Mask plate and manufacturing method thereof

Abstract

The invention discloses a mask plate and a manufacturing method thereof, and relates to the field of display. According to the mask plate, the fluidity of components of a conventional mask plate can be reduced, the problems that color mixing of a panel is poor and the rate of good products is decreased are solved, the vibration damage risk of the mask plate during the transportation, cleaning, alignment and lamination processes is reduced, the service life is prolonged, and the production cost is reduced. The mask plate comprises a frame, mask sticks with effective openings, cover sticks and howling sticks used for supporting the mask sticks, wherein the mask sticks are mutually spliced; the cover sticks cover the mutual splicing parts of the mask sticks and are used for preventing an evaporation plating material from permeating; the howling sticks are arranged vertical to the mask sticks and the cover sticks; overlapping regions of the cover sticks and the mask sticks are connected; and overlapping regions of the howling sticks and the cover sticks are connected.

Description

technical field [0001] The invention relates to the display field, in particular to a mask plate and a manufacturing method thereof. Background technique [0002] Currently, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device manufacturing process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate the organic materials to a specific position according to the design, a high-precision metal mask is required under the substrate. A pre-designed effective opening area is left on the membrane plate (that is, a high-precision metal mask plate), and organic materials are deposited on the back plate through the effective opening area to form a preset pattern. Changes in the size and position of the effective opening area on the metal mask will directly affect the accuracy of the coating. [...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a mask plate and its manufacturing method, which can reduce the fluidity of the components of the existing mask plate, solve the problems of poor color mixing of the panel and lower product yield rate caused by it, and at the same time reduce the cost of the mask plate during transportation. , cleaning, alignment, lamination, etc., the risk of vibration damage occurs, prolongs the service life and reduces production costs

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