Optical method for monitoring plasma discharging glow

Abstract

An optical method for monitoring plasma discharging glow is described, which includes the following steps. Plasma discharging glow is detected to obtain various optical signals using a detector. The optical signals are captured and converted into various electric signals by using a sensing circuit. A calculation step is performed according to the electric signals to obtain various light intensities corresponding to various locations in the plasma discharging glow using an arithmetic unit. An image of the plasma discharging glow is reconstructed according to the locations in the plasma discharging glow and the corresponding light intensities using an image reconstruction unit. The optical method can effectively detect plasma discharging glow shapes, sizes, temperature distribution, color distribution and glowing action, and corresponding intensities, absolute intensities and intensity distribution, thereby obtaining the effect of instantly monitoring plasma processing areas.

Description

technical field [0001] The present invention relates to a monitoring technology, and in particular to an optical monitoring method of plasma discharge glow. Background technique [0002] The characteristics of the plasma generated by the plasma device can be used to evaluate the performance of the plasma device. In the analysis technology of plasma characteristics, grating spectrometer is mostly used to detect and analyze the plasma type at present. However, when the grating spectrometer is used for detection, only the species and relative intensity of the plasma can be known, but the basic characteristics such as the shape and absolute intensity of the plasma cannot be known. [0003] Furthermore, no technology has been developed to correctly assess the size and shape of the plasma. Furthermore, there is no technique for directly evaluating the intensity distribution of the plasma. Contents of the invention [0004] Therefore, an object of the present invention is to p...

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Problems solved by technology

However, when grating spectrometer is used for detection, only the species and relative intensity of the plasma can be known, but the basic characteristics such as the shape and absolute intensity of the plasma cannot be known

[0003] Furthermore, no technology has been developed to correctly assess the size and shape of the plasma

Also, there is no technique for directly evaluating the intensity distribution of the plasma

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