Atomic force microscope-based multifunctional combined probe system
An atomic force microscope and multi-functional combination technology, applied in the field of precision instruments, can solve problems such as hindering the study of friction and wear mechanism, sample surface pollution, damage, etc., to achieve the effect of flexible and convenient probe switching, increase the upper space, and save the working space
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[0028] The present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.
[0029] Such as Figure 1-3 As shown in the figure, a multifunctional combination probe can realize different functions such as microscopic friction and wear experiment, surface topography scanning, crystal structure evolution detection and frictional energy dissipation measurement in situ in the same experimental area under various set working environments. needle system. In an embodiment of the present invention, a multifunctional combined probe system based on an atomic force microscope includes a vacuum chamber 1, a chamber top cover 2 installed on the vacuum chamber 1, and a light window top cover installed on the chamber top cover 2 3. The upper cover 2 of the cavity is installed on the vacuum cavity 1 through screw connection, and the vacuum cavity 1 and the upper cover 2 of the cavity are both provided with grooves for sealing rubber s...
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