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Substrate processing device

A substrate processing device and substrate technology, applied in optics, instruments, optomechanical equipment, etc., can solve problems such as sensor failure, and achieve the effect of avoiding equipment outage and facilitating replacement

Inactive Publication Date: 2016-06-15
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Since the sensor is installed inside the processing chamber, the processing liquid may be sprayed on the sensor when spraying the processing liquid on the substrate, causing the sensor to malfunction

Method used

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  • Substrate processing device
  • Substrate processing device
  • Substrate processing device

Examples

Experimental program
Comparison scheme
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Embodiment approach

[0056] As a preferred embodiment of the present invention, the substrate sensing component includes a substrate sensing sensor 110 and a sensing sheet 200 . One of the substrate sensing sensor 110 and the sensing sheet 200 is installed on the rotating shaft 300, and the other of the substrate sensing sensor 110 and the sensing sheet 200 is statically arranged relative to the processing chamber.

[0057] When the rotation shaft 300 rotates through the predetermined angle along the first direction, the substrate sensing sensor 110 and the sensing sheet 200 approach each other until the sensing sheet 200 enters the sensing range of the substrate sensing sensor 110, and the substrate sensing sensor 110 sends out the first sensory signal.

[0058] When the rotation shaft 300 rotates through the predetermined angle along the second direction, the substrate sensing sensor 110 and the sensing sheet 200 are far away from each other until the sensing sheet 200 leaves the sensing range o...

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Abstract

The invention provides a substrate processing device comprising a processing chamber, a substrate perception component, a rotating shaft and a driving component. A part of the rotating shaft is arranged in the processing chamber, and at least one of the two end parts of the rotating shaft extends to the outside of the processing chamber. The substrate perception component is arranged on the rotating shaft and positioned outside the processing chamber. The driving component is fixed on the part, which is arranged in the processing chamber, of the rotating shaft. The driving component can drive the rotating shaft to rotate around the axis of the rotating shaft along a first direction when the driving component contacts a substrate to be processed. The driving component can drive the rotating shaft to rotate around the axis of the rotating shaft along a second direction opposite to the first direction when the substrate is away from the driving component. The invention also provides substrate processing equipment. The substrate perception component is arranged outside the processing chamber so that the substrate perception component is not influenced by processing fluid.

Description

technical field [0001] The present invention relates to the field of display device manufacturing, in particular to a substrate processing device. Background technique [0002] When manufacturing a display device, it is necessary to perform processes such as cleaning and developing the substrate. When performing the above process, the substrate is sent into the processing chamber of the substrate processing equipment, and then the processing liquid is sprayed toward the substrate by a spraying mechanism. Usually, a sensor is arranged in the processing chamber of the substrate processing equipment, and the sensor is used to sense whether the substrate enters the processing chamber. [0003] Since the sensor is arranged inside the processing chamber, when the processing liquid is sprayed onto the substrate, the processing liquid may be sprayed on the sensor, causing the sensor to malfunction. [0004] Therefore, how to avoid sensor failure has become an urgent technical prob...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67023H01L21/67242H01L21/67051H01L21/6719H01L21/67253H01L21/67259B08B3/022G03F7/0007G03F7/70758G03F7/7085G03F7/70925H01L21/68764
Inventor 彭伟刚周伟谢呈男杨玉林己燮袁晨
Owner BOE TECH GRP CO LTD
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