Resistance-capacitance hybrid pressure sensor and use method thereof
A pressure sensor, resistance and capacitance technology, applied in the field of pressure sensors, can solve the problems of complex structure and high cost, and achieve the effect of high sensitivity, low cost, simple structure and principle
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[0021] figure 1 It is a pressure sensor structure and array diagram of a preferred embodiment of the present invention. It can be seen from the figure that a resistance-capacitance hybrid pressure sensor array 1 proposed by the present invention includes a piezoresistive material layer 10, a conductive Electrode layers 110 and 111, substrate layer. The piezoresistive material layer 10 is made of a material whose resistance is sensitive to pressure. The conductive electrode layers 110 and 111 are divided into upper and lower layers, which are respectively located on the upper and lower surfaces of the piezoresistive material layer 10, and on the upper surface of the conductive electrode layer 110 and 111. There is a substrate layer (not shown in the figure) on the lower surface respectively, and the number and pattern of the conductive electrodes in the conductive electrode layers 110 and 111 are determined as required. The conductive electrode layers 110 and 111 can be made o...
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