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Light homogenizing structure, manufacturing method thereof and light homogenizing system

A manufacturing method and microstructure technology, which can be used in optics, optical components, instruments, etc., can solve the problems of difficult processing and small beam etendue, and achieve the effects of low cost, improved uniformity, and uniform mixing.

Inactive Publication Date: 2016-04-20
APPOTRONICS CORP LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Embodiments of the present invention provide a homogenization structure and its manufacturing method, as well as a homogenization system, so as to solve the existing processing problems of the laser homogenization device in the prior art when the beam expansion is small. difficult question

Method used

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  • Light homogenizing structure, manufacturing method thereof and light homogenizing system
  • Light homogenizing structure, manufacturing method thereof and light homogenizing system
  • Light homogenizing structure, manufacturing method thereof and light homogenizing system

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Embodiment Construction

[0064] As mentioned in the background technology section, the laser homogenization device in the prior art has the problem of difficult processing when realizing a small etendue

[0065] In view of this, an embodiment of the present invention provides a uniform light structure, including: a substrate and a pattern structure on the surface of the substrate; wherein, the formation process of the pattern structure is a transfer process, and the pattern structure includes multiple A microstructure is used to homogenize the incident light beam irradiated on its surface to form a uniform light beam.

[0066] Correspondingly, the embodiment of the present invention also provides a dodging system, including:

[0067] a laser for emitting a laser beam to form an incident beam;

[0068] The above uniform light structure is used to receive the incident light beam, and perform uniform light on the incident light beam irradiated on its surface to form a uniform light beam;

[0069] A flu...

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Abstract

The invention discloses a light homogenizing structure, a manufacturing method thereof and a light homogenizing system. The light homogenizing structure comprises a base plate and a pattern structure arranged on the surface of the base plate. The pattern structure is formed via the transfer technology and comprises multiple micro-structures used for homogenizing incident beams irradiating the surfaces thereof. According to the invention, by refracting the incident beams irradiating the surfaces via the micro-structures, direction of propagation of the incident beams is changed; and the micro-structures will divide the incident beams into several fine sub-beams, so when the sub-beams are re-overlaid, small in-homogeneity of each sub-beam will be smoothened during the overlaying process, thereby allowing the sub-beams to be mixed more uniformly. Thus, homogeneity of the incident beams of the light homogenizing structure is improved; light homogenizing is achieved; and processing difficulties in the current laser light homogenizing device during satisfaction of requirements on quite small extension quantity of the beams can be solved.

Description

technical field [0001] The invention relates to the technical field of light uniformity, in particular to a light uniform structure and a manufacturing method thereof, and a light uniform system including the light uniform structure. Background technique [0002] Laser has the characteristics of high brightness, monochromaticity (coherence) and good directionality. It is very important and widely used in scientific research, engineering technology and industrial and agricultural production. However, since the original laser energy emitted by the laser is unevenly distributed, it is necessary to homogenize the laser beam emitted by the laser. [0003] In the prior art, laser homogenization is mainly achieved through square rods and compound eyes. Such as figure 1 As shown, for a device that uses a square rod to achieve laser homogenization, when the incident light enters the square rod 110, it undergoes multiple reflections in the square rod 110 to achieve uniform light. H...

Claims

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Application Information

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IPC IPC(8): G02B27/09B29C67/00
Inventor 胡飞谢颂婷杨佳翼
Owner APPOTRONICS CORP LTD
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