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A method for CVI densification of an open container and a gas pipeline structure

An open container, densification technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of poor gas penetration quality, slow densification speed, etc., to improve deposition speed and deposition quality. , Simple equipment, uniform densification effect

Active Publication Date: 2018-09-21
XIAN XINGUI CERAMIC COMPOSITE MATERIAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the technical deficiencies of existing small-caliber containers, poor reaction gas penetration quality and slow densification speed in the CVI preparation process, the present invention provides a CVI densification method and gas pipeline for open containers structure

Method used

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  • A method for CVI densification of an open container and a gas pipeline structure
  • A method for CVI densification of an open container and a gas pipeline structure
  • A method for CVI densification of an open container and a gas pipeline structure

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Embodiment

[0033] Taking the CVI deposition of silicon carbide in three complex containers with different shapes as an example, the three containers are arranged according to image 3 Connected to the schematic diagram, put into the deposition furnace, the container does not directly touch the crucible wall. According to the conventional CVI preparation process, the temperature is raised, and the precursors (hydrogen, argon, and MTS) are introduced to react. The generated silicon carbide can be continuously deposited from the inside to the outside. Similarly, the outer surface is deposited from the outside to the inside. The tail gas generated in the container passes through each row The gas pipe is discharged from the main exhaust pipe 11, the deposition time is increased by about 20% compared with the conventional deposition time, and the deposition effect is obviously improved.

[0034] Figure 4 Shown is a schematic diagram of the actual deposition in the furnace. The inlet of the ...

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Abstract

The invention discloses a CVI densification method for an open container and an air pipeline structure. The CVI densification method is particularly applicable to a small-opening complicated container. Specifically, an air guide pipe is inserted into a small opening of the container body; the air guide pipe is directly inserted into the bottom of the container; uniform air vents are distributed in the air guide pipe; one exhausting pipe is inserted into the air guide pipe and is used as a tail gas discharging passage; a main air guide pipe and a main exhausting pipe are respectively connected with N branch air guide pipes and N branch exhausting pipes of the container; an outer interface of the main air guide pipe is connected with an air charging pipe of a furnace; the main exhausting pipe is connected to a vacuum pump; a plurality of small-opening containers can be deposited at one time in the furnace, so the densification efficiency is improved.

Description

technical field [0001] The invention relates to a method for CVI densification of open containers and a gas pipeline structure, in particular to a preparation method and pipeline structure for rapid densification of small-opening complex containers in the process of chemical vapor infiltration (CVI). Background technique [0002] Ceramic matrix composite material is a new thermal structure / function integrated material with the advantages of metal materials, ceramic materials and carbon materials. It has high temperature resistance, low density, high specific strength, high specific modulus, oxidation resistance and ablation resistance. , Insensitivity to cracks, no catastrophic damage and other characteristics, it has a wide range of applications in the fields of machinery, aerospace, nuclear, energy, etc., and CVI is a common method for preparing this material. CVI is to place a preform of a specific shape in a deposition furnace, introduce the precursor into the preform by...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455
CPCC23C16/455
Inventor 成来飞杨云云左新章邬国平马玉洁
Owner XIAN XINGUI CERAMIC COMPOSITE MATERIAL CO LTD
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