A multi-range array pressure sensor chip and its detection method

Abstract

The invention discloses a multi-range array pressure sensor chip, which is characterized in that it includes a pressure sensor group and a temperature sensor group on the same substrate, the pressure sensor group is an M×N pressure sensor array, and the pressure sensor group There are M kinds of range pressure sensors, and at the same time there are N pressure sensors of M kinds of ranges, where M and N are arbitrary numbers, and the temperature sensor group is 2×M temperature sensor arrays, and the temperature sensor arrays are located on both sides of the pressure sensor array , there is a temperature sensor on the left and right sides of the pressure sensor corresponding to each range; a multi-range array pressure sensor chip and its detection method according to the present invention realize high reliability and high stability of pressure measurement, Can be used in various harsh environments.

Description

technical field [0001] The invention relates to a multi-range array pressure sensor chip and a detection method thereof. Background technique [0002] As a main type of pressure sensor, piezoresistive pressure sensor is widely used in aerospace, aviation, navigation, petrochemical, biomedical engineering, meteorology, geology, Seismic surveying and other fields. [0003] The working principle of the piezoresistive pressure sensor is to transform the pressure P acting on the silicon elastic body into the stress T on the elastic body, and the stress T further causes the resistance value change ΔR of the force-sensitive resistor made on the elastic body, and the resistance value The change ΔR is then converted into a voltage output ΔV through the full bridge circuit to form a voltage and pressure sensor conversion function. [0004] At present, many occasions require wide range, high precision and high sensitivity. For example, in the aerospace and aviation industry, high pr...

AI Technical Summary

Problems solved by technology

Existing MEMS pressure sensors generally have a fixed range. Small-range pressure sensors have high sensitivity when measuring low pressure, but the measurement range is narrow; large-range pressure sensors have a high measurement range, but low sensitivity when measuring low pressure. When the measured air pressure changes greatly, a large measurement error will occur

[0005] The inaccuracy of the measurement circuit and the temperature drift will reduce the measurement accuracy, so in the measurement process of the sensor, how to solve the temperature drift problem and improve the measurement accuracy is extremely important

[0006] It is worth noting that when a single ordinary pressure sensor is damaged in a harsh environment, the entire pressure measurement system will be damaged, causing large errors and wasting costs

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