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Substrate transfer device and substrate transfer method

A technology of substrate conveying and conveying direction, which is applied to conveyor objects, transportation and packaging, rollers, etc., can solve problems such as guide roller wear, and achieve the effect of prolonging life.

Active Publication Date: 2018-05-18
SHIBAURA MECHATRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, if the thickness of the substrate becomes thinner, the side surface of the substrate acts on the guide roller like a knife edge, and the guide roller wears rapidly, therefore, it is necessary to frequently replace the guide roller in a short period of time

Method used

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  • Substrate transfer device and substrate transfer method
  • Substrate transfer device and substrate transfer method
  • Substrate transfer device and substrate transfer method

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Experimental program
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Effect test

no. 1 Embodiment approach

[0018] refer to Figure 1 ~ Figure 4 The first embodiment will be described.

[0019] Such as figure 1 , figure 2 As shown, the substrate transfer apparatus 100 of the first embodiment has a shaft 1 provided along the transfer direction of the substrate W (in figure 1 The direction perpendicular to the paper surface) (hereinafter, also referred to as "the width direction of the substrate W") extends; the conveying roller 2, which is provided on the shaft 1 in a plurality at regular intervals, and is arranged as abuts against the lower surface of the base plate W; and a bearing 3 that holds the shaft 1 . Furthermore, a plurality of guide rollers 4 pass through shafts 5 (see figure 2 ) to set. The guide roller 4 is made of an elastic body such as rubber or resin, and is formed in a cylindrical shape having a height twice or more than the thickness of the substrate W. image 3 , Figure 4 As explained above, each guide roller 4 is configured to be capable of adjusting th...

no. 2 Embodiment approach

[0040] refer to Figure 5 , Figure 6 A second embodiment will be described.

[0041] The second embodiment is basically the same as the first embodiment. Therefore, in the second embodiment, differences from the first embodiment will be described, and the same parts as those described in the first embodiment will be denoted by the same reference numerals, and descriptions thereof will be omitted.

[0042] Such as Figure 5 As shown, the substrate conveying apparatus according to the second embodiment includes a guide roller adjustment unit 400 . The X-axis adjustment mechanism of the guide roller adjustment unit 400 is the same as the X-axis adjustment mechanism 200 of the first embodiment. Unlike the first embodiment, the Z-axis adjustment mechanism includes an adjustment member (spacer member) 400A between the fixed member 41 and the second movable member 42 . The position of the guide roller 4 in the Z direction can be adjusted by preparing a plurality of adjusting me...

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Abstract

The present invention provides a substrate conveying device and a substrate conveying method, which can prolong the service life of guide rollers and convey substrates without meandering. The substrate conveying device is characterized in that it has: a plurality of conveying rollers (2), which contact the lower surface of the substrate, and convey the substrate in a predetermined conveying direction; guide rollers (4), which are in contact with the substrate The direction perpendicular to the conveying direction is set so as to clamp the substrate, and a plurality of them are arranged along the conveying direction of the substrate; The part (40) has: a first movable member (45), which holds the guide roller (4) rotatably; and a Z-axis adjustment mechanism (300), which adjusts the first movable member (45) on the substrate (W ) height position in the thickness direction.

Description

technical field [0001] Embodiments of the present invention relate to a substrate transfer device and a substrate transfer method. Background technique [0002] As a substrate conveying device, a device is known in which a plurality of conveying rollers are provided on a shaft extending perpendicularly to the conveying direction of the substrate, and the substrate is conveyed by contacting the lower surface of the substrate to the conveying rollers. Furthermore, this substrate conveying device is configured such that, in addition to the conveying rollers, a plurality of guide rollers are provided along the conveying direction of the substrate to be conveyed, and the side surfaces of the substrate are guided by the guide rollers, thereby conveying the substrate to the conveyed rollers. The substrate is positioned, and the substrate can be transported without meandering. [0003] Patent Document 1: Japanese Unexamined Patent Publication No. 2010-42902 [0004] The substrate ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G13/00B65G39/18H01L21/677
Inventor 标克彦矶明典高原龙平
Owner SHIBAURA MECHATRONICS CORP
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