Device for interference detection device of surface precision of large-diameter concave aspheric lens

Abstract

The invention relates to a device for the interference detection device of surface precision of a large-diameter concave aspheric lens, and belongs to a device for detecting surface quality of an aspheric lens. A laser interferometer, a first compensation lens adjustment support, a second compensation lens adjustment support and an aspheric lens adjustment device are placed on a vibration isolation platform. A first compensation lens is fixedly connected with the first compensation lens adjustment support, and a second compensation lens is fixedly connected with the second compensation lens adjustment support. The device is advantageous in that the device is novel in structure; the precision of linear movement is at the order of submillimeter; the precision of rotational motion is at the order of one second, thereby reducing the cost; the device can detect light short circuit under the condition that no jointing method is employed; the device is small in residual aberration; the device can achieve the high-precision detection of the surface of an optical element of a large-diameter rotational symmetric concave aspheric lens; the device is convenient to install and disassemble; and the device saves the manpower cost during detection.

Description

technical field [0001] The invention belongs to an aspherical surface shape quality detection device, in particular to an adjustment device suitable for the inspection of a large-diameter rotationally symmetrical concave aspheric optical element. Background technique [0002] High-precision detection of aspheric surface shape quality is one of the most critical technologies for the wide application of aspheric surfaces, and it is also the basis for high-precision processing of aspheric surfaces. The high-precision quantitative detection methods of aspheric surfaces mainly include aberration-free point method, annular sub-aperture splicing method, computational holography method and compensator zero inspection method. [0003] For the inspection of large-aperture aspheric mirrors, the compensator zero test method is one of the most promising methods for inspecting large-aperture quadratic and high-order aspheric surfaces. It uses a compensator to convert the plane wavefront t...

AI Technical Summary

Problems solved by technology

[0006] The invention provides a device for interference detection of large-diameter concave aspheric mirror surface precision to solve the problem of the large residual wave aberration in the zero-test method of the existing large-diameter aspheric mirror compensator and the inability to detect large-diameter concave aspheric optical elements. To solve the problem of comprehensive and accurate measurement of the surface shape, the present invention adjusts the position and posture of the workpiece in four dimensions to achieve high-precision detection of the large-diameter concave aspheric mirror surface shape

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