Mechanical arm

Abstract

The invention provides a mechanical arm, and relates to the field of automation. The mechanical arm solves the problems that when a conventional mechanical arm takes and places boards, the conventional mechanical arm needs to rotate, so that the occupied space is large, and the rate of qualified products is reduced. The mechanical arm is mounted between a first chamber and a second chamber of vacuum reaction equipment, and used for moving the boards in the first chamber to the second chamber. The mechanical arm comprises a first supporting structure, arms and a vertically-moving mechanism, wherein railways in the first direction of a horizontal plane are formed in the first supporting structure; the first chamber and the second chamber are respectively positioned at two opposite ends of the railways; the arms are mounted on the first mounting structure and used for bearing the boards; the arms can move along the railways; the first supporting structure and the arms are mounted on the vertically-moving mechanism, and the first supporting structure and the arms can be driven by the vertically-moving mechanism to move in the vertical direction.

Description

technical field [0001] The invention relates to the field of automation, in particular to a manipulator. Background technique [0002] At present, in the production process of TFT-LCD (ThinFilmTransistor-LiquidCrystalDisplay, thin film transistor liquid crystal display), the vacuum reaction equipment used such as figure 1 As shown, it includes a vacuum transition chamber, a transfer chamber and at least one reaction chamber, wherein the transfer chamber is connected to the vacuum transition chamber and each reaction chamber respectively. Wherein, a manipulator is provided in the transfer chamber, and the manipulator can realize the turnover of plate-shaped products such as substrates between the vacuum transition chamber and each reaction chamber. [0003] Such as figure 2 As shown, the existing manipulator 10 includes: a first support structure 11, a second support structure 12, a third support structure 13 and an arm 14; wherein, the first support structure 11 can be on...

AI Technical Summary

Problems solved by technology

[0005] The inventors found that the existing manipulators have the following problems in the process of taking and placing substrates. On the one hand, during the rotation process of the first support structure 11, the substrate has the risk of falling from the arm 14, and the yield rate of the product is reduced

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