Vertically placed two-dimensional large-stroke fast moving device for repairing micro-defects on the surface of large-aperture curved optical elements

A technology of optical components and vertical placement, applied in the field of two-dimensional large-stroke fast moving devices, can solve the problems of slow moving speed and installation error, and achieve the effect of structural optimization

Inactive Publication Date: 2017-03-29
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The present invention aims to solve the problems of the slow moving speed of the three-station of the two-dimensional large-stroke fast moving device and the installation error caused by multiple clamping during the laser repair process of the existing optical elements, and proposes a large-caliber curved optical element surface Vertically placed two-dimensional large-stroke fast moving device for micro-defect repair

Method used

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  • Vertically placed two-dimensional large-stroke fast moving device for repairing micro-defects on the surface of large-aperture curved optical elements
  • Vertically placed two-dimensional large-stroke fast moving device for repairing micro-defects on the surface of large-aperture curved optical elements
  • Vertically placed two-dimensional large-stroke fast moving device for repairing micro-defects on the surface of large-aperture curved optical elements

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specific Embodiment approach 1

[0036] Specific implementation mode 1. Combination figure 1 , figure 2 and image 3 Describe this embodiment. The vertically placed two-dimensional large-stroke rapid moving device for repairing micro-defects on the surface of large-diameter curved optical elements described in this embodiment includes an X-axis motion unit, a gantry, a Y-axis motion unit, and a bearing frame. 9;

[0037] The X-axis motion unit includes the X-axis servo motor 1, the X-axis moving guide rail 2, the air bearing pad 3 and the bearing plate 4; the X-axis servo motor 1 is fixed on one end of the frame driving the X-axis moving guide rail 2, and the X-axis servo motor 1 drives the X-axis The axis moving guide rail 2 moves linearly in the direction of the X axis. The X axis moving guide rail 2 is equipped with a guide rail slide table. The load bearing plate 4 is fixed on the guide rail slide table. The X axis moving guide rail 2 drives the guide rail slide table to move. Pads 3 are evenly arrang...

specific Embodiment approach 2

[0044] Specific embodiment two, combine Figure 4 Describe this embodiment. This embodiment is a further description of the vertically placed two-dimensional large-stroke rapid movement device for repairing micro-defects on the surface of large-diameter curved optical elements described in Embodiment 1. The X-axis motion unit also includes a sheet metal box The upper cover 5, the lower slot 6 of the sheet metal box and the outlet box 7;

[0045] The lower slot 6 of the sheet metal box is fixed on both sides of the X-axis moving guide rail 2, the upper cover 5 of the sheet metal box is fastened on the X-axis moving guide rail 2 and the lower slot 6 of the sheet metal box, and the upper cover 5 of the sheet metal box is connected with the Between the lower grooves 6 of the sheet metal box body is a wiring trough, and the outlet box 7 is arranged on the outside of the lower groove 6 of the sheet metal box body, and the wire outlet of the outlet box 7 is aligned with the wiring gr...

specific Embodiment approach 3

[0047] Specific Embodiment 3. This embodiment is a further description of the vertically placed two-dimensional large-stroke rapid moving device for repairing micro-defects on the surface of large-diameter curved optical elements described in specific embodiment 1 or 2. The carrying frame 9 is provided with two A limit block 17, the two limit blocks 17 are fixed on the upper side of the lower frame plate of the bearing frame body 9, and the limit block 17 is used to limit the position of the device to be repaired.

[0048] The limit block described in this embodiment is used to adjust and fix the position of the optical device.

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Abstract

The invention discloses a vertically-arranged two-dimensional large-stroke rapid moving device for repairing microdefects of the surface of a large-caliber hook-face optical element, and relates to a two-dimensional large-stroke rapid moving device. The problems that in the existing optical element laser repairing process, the movement speed of a two-dimensional large-stroke rapid moving device is low among three stations, and installation errors are caused by multiple times of clamping are solved. An X-axis servo motor drives an X-axis movement guide rail to linearly move in the X-axis direction. A load bearing plate is fixed to a guide rail sliding table. A portal frame structure is formed by two stand columns and a transverse portal plate. A closed structure is defined by two vertical portal plates, portal rib plates and the transverse portal plate. Two Y-axis movement guide rails are fixed to the inner sides of the two stand columns respectively. A Y-axis servo motor drives one Y-axis movement guide rail to vertically move. A left border and a right border of a load bearing frame are fixed to guide rail sliding tables of the two Y-axis movement guide rails respectively. The vertically-arranged two-dimensional large-stroke rapid moving device is suitable for repairing the microdefects of the surface of the large-caliber hook-face optical element.

Description

technical field [0001] The invention relates to a two-dimensional large stroke fast moving device. Background technique [0002] With the depletion of fossil energy, nuclear fusion energy has become the most ideal future energy for human beings due to its inexhaustible and clean advantages. As the core optical component of strong laser output, fused silica with excellent optical properties plays an important role in inertial confinement fusion devices. However, in the process of ultra-precision machining and laser targeting, the surface of fused silica is prone to micro-defects in the form of micro-cracks or ablation. If no measures are taken to deal with it in time, these micro-defects will continue to grow during the subsequent laser targeting process, eventually leading to damage to the entire optical component. In order to improve the service life of fused silica optical components, the Lawrence Livermore National Laboratory (LLNL) of the United States adopts a "circul...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N33/00B23K26/08B23K26/352G01N21/01
CPCB23K26/0853G01N21/01
Inventor 陈明君赵林杰廖然郑万国李省伟袁晓东王海军
Owner HARBIN INST OF TECH
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