A continuous horizontal immersion coating system and method

Abstract

The invention belongs to the technical field of film plating, and discloses a continuous horizontal dipping film coating system and a method. The continuous horizontal dipping film coating system comprises a robot, a robot control center and a circulating slide rail, wherein the robot and the robot control center are in signal connection; the robot is slidingly arranged on the circulating slide rail; the circulating slide rail is used for circularly sliding the robot; the robot is provided with an operation arm; multiple suckers for absorbing substrate base pieces are arranged at the front end of the operation arm; the robot drives the operation arm to act; and a film plating solution tank and a cleaning tank are formed beside the circulating slide rail. The system and the method integrate the dipping film plating, the cleaning and the drying as a whole, so that the defects of discontinuous procedures and long time consumption in the prior art are overcome, the full-automatic high-stability production of the dipping film plating with any area can be realized, the defect of severe uniformity deviation in upper, middle and lower areas of vertical pull dipping is overcome, and all points of horizontal dipping film plating are consistent, and the uniformity is excellent.

Description

technical field [0001] The invention belongs to the technical field of coating, and in particular relates to a continuous horizontal immersion coating system and method. Background technique [0002] Thin film preparation equipment refers to the preparation of multifunctional thin films on substrates with special functions by means of thin film preparation equipment on clean substrates. The immersion coating refers to the method of immersing a specific substrate into a specific solution to form a thin film with certain functions on the substrate. [0003] At present, the relatively mature method of immersion coating in China is the method of dipping and pulling coating. Immersion pulling coating is also called vertical pulling coating, which adopts vertical pulling method to achieve the function of forming a functional film by controlling the pulling speed, pulling time, coating times and optimization of coating interval parameters. The vertical lifting method is a commonl...

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Problems solved by technology

Especially for large-area vertical coating, the bottom of the substrate is the earliest to enter the solution and the latest to leave the solution. As a result, under the same immersion coating conditions, the solution attached to the upper, middle and lower areas has a large difference, which affects the optical and electrical properties of the final functional film;

[0005] 2. At present, the method of vertically pulling the coating is the way of clamps. The width of the clamps to clamp the edge of the glass is about 10mm. During the vertical coating process, the bottom of these clamps will be immersed in the solution or cleaning solution, resulting in During the pulling process or the subsequent air-drying process, residual water flow will re-enter the membrane surface, resulting in a large number of defects on the membrane surface, which will affect the stable production of the process.

Under normal circumstances, for fine coating, no jig is allowed to touch the coating surface of the substrate, because the touched area cannot form a coating in the solution, which will affect the yield and final end use;

[0006] 3. Due to the increase of the area, the uniformity of the functional film formed by the vertical pulling coating will decrease significantly. Therefore, the current vertical pulling is mainly used in small-area scientific research fields

For a small area, such as 3cm*3cm, the uniformity of the vertical coating will not be affected, and from the perspective of scientific research, the most uniform point in the middle is sufficient, without worrying about the uniformity of the entire surface, and for a large area, such as 1400* The 1100mm substrate has extremely strict requirements on its uniformity, which cannot be realized stably by the current vertical pulling method;

[0007] 4. The vertical pull coating method is not suitable for fast switching of different thickness substrates

For example, substrates of 1400(L)*1100(W)*3(T)mm and 1400(L)*1100(W)*4(T)mm, under the same area, have a weight difference of 4.5KG, and the same solution tank In the case of a large volume, there will be different degrees of overflow, resulting in the need to use additional devices to continuously replenish liquid when switching between different substrates, increasing additional investment costs;

[0008] 5. The beat of vertically pulling the coating takes a long time. Due to the influence of different sizes and different thicknesses of glass, the pulling speed is very slow, otherwise it will easily lead to unstable solution, which will eventually lead to the function formed on the substrate. Membrane instability until uniformity is affected

In particular, most of the functional films of immersion coating need to undergo subsequent cleaning and other processes, which means that the vertical cleaning method will consume a lot of time and thus cannot be mass-produced;

[0009] 6. The vertical pulling coating is very sensitive to the defects on the surface of the substrate and its attached particles. During the vertical pulling process, these defects or attached particles slide on the surface of the functional film, resulting in the formation of defects on the surface of the functional film, affecting the final product yield;

[0010] 7. For building-integrated coated glass, from the perspective of safety, the thickness of the glass is 4mm, 6mm or 8mm or thicker. From the perspective of appearance, the building has extremely strict requirements on the appearance and color consistency of the glass. The requirements for uniformity are higher, so the limitations of the vertical lifting method will be more prominent;

[0011] 8. For large-area vertical coating, it is necessary to design a very deep solution tank. For example, for a glass with a height of 1.4 meters, it means that the tank needs to be higher than 1.4 meters, and a too deep solution tank will easily lead to partial functional solutions. It will deposit to the bottom, causing the concentration of the solution in the tank to gradually increase from top to bottom, which is not conducive to the uniform preparation of functional films

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