A Laser Interferometric Displacement Measuring System

A technology of displacement measurement and laser interference, which is applied in the field of optical measurement, can solve problems such as difficult adjustment, limitation of working machine movement stroke, performance parameters such as movement accuracy, and inconvenient installation, so as to achieve accurate measurement results, low price, and convenient installation.

Inactive Publication Date: 2017-06-16
HUAZHONG UNIV OF SCI & TECH
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the grating measurement device must always be close to the grating, which has very strict requirements on the position. Not only is it inconvenient to install and difficult to adjust, but the limitation of its position will also limit the performance parameters such as the movement stroke and movement accuracy of the working machine.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A Laser Interferometric Displacement Measuring System

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0021] Such as figure 1 As shown, the laser interference displacement measurement system of the embodiment of the present invention includes a laser 1, a polarizer 2, a first depolarization beam splitter 3, a first polarization beam splitter 4, a first 1 / 4 wave plate 8, a first plane reflection Mirror 9, the second plane mirror 10, the second 1 / 4 wave plate 5, the corner mirror 6, the third pla...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a laser interference displacement measuring system. Including lasers, polarizers, depolarizing beamsplitters, polarizing beamsplitters, 1 / 4 wave plates, corner cube mirrors, flat mirrors and photodetectors. When the measurement light is incident on the moving cube mirror, the optical path change of the light reflected back from the original path caused by the displacement of the cube mirror is four times that of the displacement of the cube mirror. In this design, the measurement light enters and exits the moving cube mirror twice in the same direction through the principle of polarization optics, realizing the eightfold relationship between the change in the optical path difference between the measuring light and the reference light and the displacement of the cube mirror, so as to realize the optical octave of the displacement. times subdivision measurement. The system has the advantages of high measurement resolution and accurate measurement results, convenient and simple structural installation, low price and wide application range.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and more specifically relates to a laser interference displacement measurement system, in particular to an ultra-precise laser interference displacement measurement system with optical eightfold subdivision. Background technique [0002] At present, with the rapid development of modern industry, displacement measurement has become very important, and such as the measurement of micro-deformation displacement of machine tools under load conditions, the measurement of the profile of precision optical components, etc., the requirements for displacement measurement speed and accuracy are very high. Common displacement measurements include mechanical, electronic, and geometric optics. Mechanical displacement measuring instruments such as vernier calipers have the disadvantages of low measurement accuracy and the measurement results are heavily dependent on labor. Inductive and capacitive pre...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 刘晓军李千赵昊
Owner HUAZHONG UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap