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A closed-loop micro-displacement stepping drive device with variable step distance with displacement sensing function

A technology of stepping drive and displacement sensor, applied in measuring devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc., can solve the problem of low positioning accuracy and repeat positioning accuracy, and large structural size , Large travel displacement sensor is expensive and other issues

Active Publication Date: 2018-02-02
项惠仲
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Solve the problems of the current micro-displacement driver, such as large structural size, complex structure, small output stroke, low positioning accuracy and repeat positioning accuracy, separation of the driver and sensor during closed-loop control, and high price of large-stroke displacement sensors.

Method used

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  • A closed-loop micro-displacement stepping drive device with variable step distance with displacement sensing function

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Effect test

Embodiment Construction

[0013] The detailed content and specific implementation of the present invention will be further described in conjunction with the accompanying drawings.

[0014] When using two sets of stepping piezoelectric actuator units as displacement actuators:

[0015] In the initial state, the hoop piezoelectric stack (2) (9) (17) (11) is powered on, the upper mechanism (3) and the lower mechanism (15) are fixed on the guide rail (1), and then the displacement sensor is recorded (6) and set it as the origin. When the movement starts, first turn off the hoop piezoelectric stack (9), release the locking mechanism (10) and the guide rail (1), and then apply a certain voltage to the stroke piezoelectric stack (4) to generate displacement. This makes the value of the displacement sensor (6) fixed on the upper mechanism (3) change, and this value is the stepping distance of the driver, which can be determined according to the voltage adjustment. Then power on the hoop piezoelectric stack (...

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Abstract

The invention discloses a high-precision closed-loop micro-displacement drive device with a variable step distance and a displacement sensing function, which belongs to the field of electromechanical integration. It can perform closed-loop fixed-length stepping with variable distance, so as to achieve the purpose of repeating high-precision positioning, and can realize large-stroke precise movement without expensive large-stroke displacement sensors. It has the advantages of simple structure, small size, high positioning and repeat positioning accuracy, high displacement resolution, fast response speed, good control characteristics, low energy consumption, no noise, and low cost.

Description

technical field [0001] The invention is not only a high-precision closed-loop micro-displacement driving device with a variable step distance and a displacement sensing function, but also a high-precision displacement sensor for measuring in a step-by-step manner. this invention [0002] It involves the field of mechatronics and the field of sensing, measurement and control, and can be used as a driver of a high-precision closed-loop linear or torsional motion mechanism, and can also be used as a sensing device for high-precision displacement measurement. Can be applied to ultra-precision machining, precision engineering, micro-electromechanical systems (MEMS), micro-robots, semiconductor manufacturing, biomedicine, aerospace, laser high-speed sintering, high-resolution laser projection and other scientific manufacturing fields, and consumer electronics . Background technique [0003] With the continuous development of modern science and technology, human research on the m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/06G01B21/02
Inventor 项惠仲
Owner 项惠仲
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