A touch module, its manufacturing method, touch screen and display device
A touch module and touch electrode technology, which is applied in the field of touch screens, display devices, and touch modules, and can solve the problem of increased square resistance of the first terminal, complex manufacturing process of the touch module, and damage to the first terminal and other problems, to achieve the effect of reducing square resistance, eliminating the need for patterning process, and eliminating the need for stripping process
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[0072] Example 1: If Figure 7 The manufacturing method of the shown flexible touch module, such as Figure 10a-Figure 10i shown, including the following steps:
[0073] 1. Apply a transparent PI solution on the substrate 12, and heat-cure the PI solution to form a flexible film 10, such as Figure 10a shown;
[0074] 2, grow graphene film 14 on copper foil 13 by CVD method, as Figure 10b shown;
[0075] 3. The graphene film 14 grown on the copper foil 13 is transferred to the surface of the flexible film 10, such as Figure 10c shown;
[0076] 4. Coating a photoresist on the surface of the graphene film 14, performing soft baking, exposure, development and hard baking on the photoresist, and performing a plasma dry etching process on the graphene film 14 not covered by the photoresist , peeling off the photoresist to obtain the pattern of the first touch electrode 1, the first peripheral lead 2 and the first connection terminal 3, such as Figure 5 and Figure 10d sh...
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