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LDI double workpiece exposure device and exposure method

An exposure device and double-workpiece technology, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, etc., can solve problems such as hidden safety accidents, and achieve the effect of reducing the occurrence probability of hidden safety accidents

Active Publication Date: 2015-09-30
中夏芯基(上海)科技有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, while the double-workpiece exposure machine brings high-efficiency production, it also buryes hidden dangers of safety accidents

Method used

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  • LDI double workpiece exposure device and exposure method
  • LDI double workpiece exposure device and exposure method
  • LDI double workpiece exposure device and exposure method

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0030] An embodiment of the present invention provides an LDI double workpiece exposure device, such as figure 1 and figure 2 As shown, it includes a first protection door 1, a second protection door 2, a first work table 3 and a second work table 4;

[0031] The first workpiece table 3 and the second workpiece table 4 are respectively used to fix the PCB board to be exposed. The first workpiece table 3 and the second workpiece table 4 have a moving stroke respec...

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Abstract

The invention provides an LDI double workpiece exposure device. The exposure device comprises a first protective door, a second protective door, a first workpiece table and a second workpiece table, wherein the first workpiece table and the second workpiece table are respectively used for fixing a to-be-exposed PCB panel, and the PCB panel is exposed by the first workpiece table and the second workpiece table within the self shift motion ranges; the first protective door and the second protective door are respectively arranged on the upper sides of the first workpiece table and the second workpiece table, are parallel with each other and positioned on different planes, and can be respectively moved to the upper sides of the first workpiece table and the second workpiece table along respective planes. The invention also provides an exposure method for the LDI double workpiece exposure device. According to the exposure device provided by the invention, safety doors are arranged, so that operating personnel can be prevented from touching the running workpiece tables; the workpiece tables are separated by protective baffles, so that the hands of operating personnel can be prevented from mistakenly entering one side of an exposure zone and being knocked by a running sucker.

Description

technical field [0001] The invention relates to the field of LDI lithography machines, in particular to a double worktable device and an exposure method for exposing PCB boards. Background technique [0002] With the rapid development of the PCB industry, single-workpiece exposure machines can no longer meet the needs of production, and faster, higher-capacity dual-workpiece exposure machines have emerged. However, while the double-workpiece exposure machine brings high-efficiency production, it also buryes hidden dangers of safety accidents. [0003] Double worktable exposure machine is to place two worktables on one machine, and separate the exposure process and the plate placement process on the two worktables, but they are continuous on a single worktable, and use the exposure time of one of the worktables When it is empty, put another workpiece table, so that the cycle is repeated, so as to reduce time waste, improve work efficiency and increase production capacity. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 张磊王晓光卫功文
Owner 中夏芯基(上海)科技有限公司
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