System and apparatus for providing real-time wavelength correction for laser displacement interferometer

A technology of laser displacement and interferometer, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve problems such as high cost, inability to achieve absolute frequency stability, and wavelength drift

Inactive Publication Date: 2015-09-30
常州和悦光电科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the laser is at different temperatures, the wavelength will drift due to the thermal expansion and contraction of the resonant cavity length
Existing laser displacement interferometers all use different laser frequency stabilization techniques

Method used

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  • System and apparatus for providing real-time wavelength correction for laser displacement interferometer
  • System and apparatus for providing real-time wavelength correction for laser displacement interferometer

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Experimental program
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Embodiment approach

[0010] One embodiment of the present invention is figure 2 As shown, for any laser displacement interferometer composed of a laser light source, a displacement interference module and a moving mirror, as long as the laser light is separated into a beam (1) by a beam splitter, the device of the present invention can be used to sense the laser Real-time wavelength to provide wavelength correction for laser displacement interferometers.

[0011] Specify a representative figure:

[0012] (1) The designated representative for this case is as follows: figure 1 .

[0013] (2) A brief description of the component symbols in this representative diagram:

[0014] 1: split the beam from the laser displacement interferometer

[0015] 2: Penetrating grating film

[0016] 3: Diffraction beam

[0017] 4: Focusing lens

[0018] 5: Focus beam

[0019] 6: Optical position sensor

[0020] 7: Support table

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PUM

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Abstract

The invention relates to a system and apparatus for providing real-time wavelength correction for a laser displacement interferometer. The apparatus comprises a diffraction type grating, a focusing lens, and a laser spot position sensor. The diffraction type grating is used for generating a specific diffraction angle for laser light with a specific wavelength according to an optical diffraction principle; a combination unit of the focusing lens and the position sensor is used for sensing a diffraction angle change being a real-time changing value based on the environmental factor influence on the laser wavelength, thereby providing real-time correction of the actual wavelength value. The system having real-time self-wavelength-correction function has advantages of simple structure and low cost and is suitable for any laser displacement interferometer. A laser diode can be used as a light source, thereby reducing the overall dimension of the laser displacement interferometer; and the system is suitable for a displacement sensor as a short-stroke nanometer positioning platform.

Description

[0001] 【Technical field to which the invention belongs】 [0002] The invention relates to an optical system and device with real-time correction of laser wavelength, which is suitable for any laser displacement interferometer whose counting unit is wavelength, and belongs to the technical field of precision measurement and precision machinery. 【Background technique】 [0003] The working principle of a general laser is to use the standing wave in the optical resonant cavity to resonate with the luminous body. The light beam shuttled repeatedly excites the high-energy electrons in the luminous body, and finally forms a light beam with high energy density to advance in a straight line. It has high brightness, single Good color and coherence. Because it still maintains good luminous properties in various environments, it is widely used in various industrial levels. The laser displacement interferometer composed of the basic unit of displacement calculation based on wavelength valu...

Claims

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Application Information

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IPC IPC(8): G01B9/02
Inventor 范光照许智钦
Owner 常州和悦光电科技有限公司
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