Bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and detection method thereof

Abstract

The invention discloses a bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and a detection method thereof; the bionic hair sensor includes a top polymer hair, a middle annular silicon micro-sensor structure, and a bottom signal wire prepared on a glass substrate. When acted by an external accelerated velocity or fluid, the top hair drives a round mass block and an annular mass block in the annular silicon micro-sensor structure to swing; with use of a negative stiffness effect principle of an electrostatic force, and through swinging of the round mass block and the annular mass block in the annular silicon micro-sensor structure, resonant frequencies of resonators arranged around the round mass block and the annular mass block are caused to be changed, and values of the flow velocity and the accelerated velocity are detected; with use of a coupling structure of the mass block and the annular mass block, the swinging direction of the top hair is subjected to vector decomposition, and the vector direction of the accelerated velocity or the fluid velocity is detected.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical inertial measurement, in particular to a bionic hair sensor for flow velocity and acceleration vector sensitivity. Background technique [0002] MEMS (Micro-Machined Electro Mechanical Sensor) is the abbreviation of micro-electromechanical mechanical sensor, which is a micron-scale device and tool similar to an integrated circuit. MEMS technology is a basic technology with broad application prospects. MEMS sensors designed and manufactured with semiconductor technology and micro-electromechanical processing technology have a high degree of integration and can be integrated with signal processing circuits, which greatly reduces production costs and has achieved great development in the fields of automobiles, consumer electronics and communication electronics. MEMS acceleration sensors can be divided into piezoelectric, piezoresistive, capacitive, resonant, thermal convection, etc. according ...

AI Technical Summary

Problems solved by technology

However, the hair-type sensors developed by most institutions can only measure the size of the physical quantity, but cannot measure the direction of the physical quantity, and the function is single, the structure is relatively complicated, and the practicability is poor.

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