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Operation control method and device for a rotating electrical machine

A technology for rotating electrical machines and operation control, which is applied to the starter, motor generator/starter, etc. of a single polyphase induction motor, and can solve the problem that the rotating electrical machine cannot be reversed.

Active Publication Date: 2017-07-21
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a method for controlling the operation of a rotating electrical machine to solve the problem that the rotating electrical machine cannot be reversed

Method used

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  • Operation control method and device for a rotating electrical machine
  • Operation control method and device for a rotating electrical machine
  • Operation control method and device for a rotating electrical machine

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Embodiment Construction

[0088] In order to make the above objects, features and advantages of the embodiments of the present invention more comprehensible, the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0089] refer to figure 2 , shows a flow chart of the steps of an embodiment of a method for controlling a gas passage in an embodiment of the present invention, the rotating motor drives the rotating tray to rotate, and materials are placed on the tray, such as figure 2 As shown, the method includes the following steps:

[0090] Step 201, calculating the compensation pulse when the rotating electrical machine rotates;

[0091] refer to Figure 3a , shows a schematic diagram of gear meshing of a rotating electrical machine according to the present invention. Such as Figure 3a As shown, there will be a displacement difference in gear meshing, which is the gear meshing gap. Whe...

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Abstract

Embodiments of the present invention provide a method and device for controlling the operation of a rotating motor. The rotating motor drives a rotating tray to rotate, and materials are placed on the tray. The method includes: calculating the compensation pulse when the rotating motor rotates; Calculate the number of forward intervals and the number of reverse intervals for the material to move from the current position in the rotating tray to the target position; based on the compensation pulse, the number of reverse intervals, the number of forward intervals and the rotation motor The direction of the last rotation determines the pulse required to drive the material from the current position to the target position; the pulse is used to drive the rotating motor to rotate to move the material from the current position to the target position. The present invention overcomes the influence of gear clearance by adding compensation pulses, realizes reverse rotation, improves the efficiency of material transmission, and further improves the efficiency of production.

Description

technical field [0001] The invention relates to the control field of semiconductor equipment, in particular to an operation control method of a rotating electric machine and an operation control device of the electric rotating machine. Background technique [0002] Many semiconductor devices use rotating motors to drive rotating trays for material transfer, such as APCVD (Atmospheric Pressure Chemical Vapor Deposition, Atmospheric Pressure Chemical Vapor Deposition) equipment. [0003] However, the rotating motor can only rotate in the forward direction, and its pulse count continues to accumulate. In order to avoid data overflow, it needs to be manually cleared every time the process is executed, which is cumbersome to operate. [0004] In particular, under certain process requirements, such as figure 1 In the pallet of the APCVD equipment shown, in the current process chamber, the No. 3 material has just completed the process, and the No. 4 material is scheduled to be the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02P1/40
Inventor 张京华
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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