Process method for improving two-dimensional graph resolution

Abstract

The invention relates to the technical field of semiconductor technologies, and provides a process method for improving two-dimensional graph resolution. According to the method, a double-exposure mode is adopted, and for the region where circular beads are generated easily and shortened easily in a final design graph, in the first exposure process, a first graph of a first metal pattern plate is preprocessed to outwards extend by a certain distance; in the second exposure process, a second photoetching glue layer is coated, a second metal pattern plate is used for blocking a pre-extension region, the finally-formed graph is made to be consistent with the design graph through exposure etching, the phenomena that the graph generates corners and becomes round, and the line end is shortened are avoided, graph distortion is prevented, and the resolution of the two-dimension graph is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a process method for improving the resolution of two-dimensional graphics. Background technique [0002] With the continuous improvement of semiconductor integrated circuit manufacturing technology and the continuous reduction of line width, the area of ​​semiconductor devices is becoming smaller and smaller. Semiconductor integrated circuits also have more comprehensive and powerful functions from the initial integrated circuits to large-scale integrated circuits, ultra-large-scale integrated circuits, and today's ultra-large-scale integrated circuits. Considering the constraints of unfavorable factors such as the complexity, long-term and high cost of process research and development, how to further increase the integration density of devices and reduce the chip area on the basis of existing technologies, so as to achieve as much as possible on the same sili...

AI Technical Summary

Problems solved by technology

see figure 1 as well as figure 2 , figure 1 for pre-designed graphics, figure 2 For the actually formed graphics, compare figure 1 as well as figure 2 It can be clearly seen that the actually formed graphics are better than the pre-designed graphics, resulting in the problems of rounded corners and shortened line ends

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