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APM belt speed real-time monitoring device and method

A belt speed, real-time monitoring technology, applied in the field of integrated circuit manufacturing, can solve the problems of affecting film thickness, abnormal belt speed, easy slipping, etc., and achieve the effect of avoiding multiple conversions

Inactive Publication Date: 2015-06-03
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantages of this monitoring method are: 1) After multiple conversions, the motor speed cannot effectively represent the belt speed; 2) The small belt drives the gearbox through the rotating shaft, and the rotating shaft is prone to slip due to long-term wear. , the speed of the motor remains the same, but the final speed transmitted to the belt is slowed down, resulting in the problem that the belt speed is abnormal and the machine cannot detect it, which directly affects the thickness of the film.

Method used

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  • APM belt speed real-time monitoring device and method
  • APM belt speed real-time monitoring device and method
  • APM belt speed real-time monitoring device and method

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Embodiment Construction

[0016] In order to have a more specific understanding of the technical content, characteristics and effects of the present invention, now in conjunction with the accompanying drawings, the details are as follows:

[0017] The present invention adopts the contact roller method to monitor the belt speed of APM in real time, and its working principle is as follows: figure 2 As shown, a metal roller is installed under the belt (it must be made of metal to prevent the surface of the roller from being scalded), the roller and the belt are in direct contact (the length of the contact surface must be more than 2 cm to ensure that the roller does not slip), and the distance between the roller and the belt maintain a certain pressure.

[0018] When the belt is running, the belt drives the rollers to rotate synchronously in the opposite direction to the belt, and the two form a real-time relative motion system, and the actual speed of the belt is transmitted to the rollers in real time....

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PUM

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Abstract

The invention discloses an APM belt speed real-time monitoring device. The device mainly comprises a metal roller, wherein the metal roller is installed below a belt and directly contacts with the belt, and the length of a contact surface is more than 2cm. The invention also discloses a method based on the device for monitoring the speed of an APM belt in real time. The roller is additionally installed below the belt and forms a reverse synchronous movement system together with the belt, the speed of the belt is monitored by utilizing the rotation speed of the roller, the problem of multiple conversion and driving a large scale by virtue of a small scale can be avoided, and the real-time and effective monitoring of the APM belt speed can be realized.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a real-time monitoring device and method for crawler belt speed in a crawler belt operation mode. Background technique [0002] The working principle of APM (tracked operation mode) is as follows figure 1 As shown, the motor rotates at high speed, and the gearbox is driven by the rotating shaft. The gearbox converts the speed of the motor into the speed required by the process, and then drives the track (belt) to run through the gear. [0003] In this working mode, the belt speed is monitored by monitoring the motor speed, that is, the default motor speed is the belt speed. The disadvantages of this monitoring method are: 1) After multiple conversions, the motor speed cannot effectively represent the belt speed; 2) The small belt drives the gearbox through the rotating shaft, and the rotating shaft is prone to slip due to long-term wear. , the speed of the motor ...

Claims

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Application Information

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IPC IPC(8): G01P3/36
Inventor 周俊严玮程望阳
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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