Processing device

Abstract

The present invention provides a processing device which can correct the warping of a workpiece without complicating the structure of the device, and can keep the workpiece on a chuck workbench reliably. A conveying pad (21) possesses an absorption surface (211) of absorbing and keeping the central part of the workpiece, a pressing part (22) possesses an annular pressing surface (211) with an internal diameter greater than the external diameter of the conveying pad (21), and a forwarding and withdrawing part penetrates a hole (231) and a shaft (24) and enables the conveying pad (21) to forward and withdraw along a direction vertical with the absorption surface (211) between a position of the absorption surface (211) protruding towards the pressing surface (221) and the position at which the absorption surface (211) and the pressing surface (221) are located in a same plane. A lifting component (26) enables a keeping mechanism (20) keeping the workpiece to move towards the direction of the chuck workbench (13), thereby pressing the workpiece against the chuck workbench (13). Therefore, the forwarding and withdrawing part acts, so that the absorption surface (211) is positioned in the plane same with the pressing surface (221), the warping of the workpiece is corrected, and the chuck workbench (13) keeps the workpiece.

Description

technical field [0001] The present invention relates to a processing device for processing a disc-shaped workpiece. Background technique [0002] When a disc-shaped workpiece such as a wafer is ground thin or is subjected to thermal processing, the workpiece may warp. When grinding or grinding such a warped workpiece, the workpiece cannot be reliably held on the chuck table while the workpiece remains warped. Therefore, there has been proposed a machining device that presses the outer peripheral region of the workpiece with a pressing pad to correct the warpage and hold the workpiece on the chuck table (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent Laid-Open No. 2009-107097 [0004] However, in the processing device described in Patent Document 1, the conveyance mechanism requires an air cylinder that advances and retreats the pressing pad in the pressing direction separately from the suction pad that adsorbs and conveys the workpiec...

AI Technical Summary

Problems solved by technology

[0004] However, in the processing device described in Patent Document 1, the transport mechanism requires an air cylinder that advances and retreats in the pressing direction separately from the suction pad that absorbs and transports the workpiece, so the structure becomes complicated.

In addition, if the structure of the device becomes complicated, failures will easily occur accordingly. Therefore, for example, it is necessary to provide a sensor for identifying whether the pressing pad is advancing and retreating normally, thereby making the structure more complicated.

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