Double cavity type piezoelectric micropump

Abstract

A double cavity type piezoelectric micropump comprises a cover body, a shell and a pump core component, wherein the shell is fixedly matched with the cover body, pump cavities are defined by the cover body and the shell, and the pump core component is located in the pump cavity. The cover body is provided with a first locating protrusion and a first pre-pressing portion, and the shell is provided with a second locating protrusion and a second pre-pressing portion; the pump core component comprises a primary support together clamped by the first locating protrusion and the second locating protrusion, a secondary support fixedly matched with the primary support, a first elastic seal ring arranged on the primary support, a second elastic seal ring arranged on the secondary support, a first piezoelectric vibrator the periphery of which is pre-pressed on the first elastic seal ring and abuts against the first pre-pressing portion, a second piezoelectric vibrator the periphery of which is pre-pressed on the second elastic seal ring and abuts against the second pre-pressing portion, a first inlet valve and a first outlet valve arranged on the primary support, and a second inlet valve and a second outlet valve arranged on the secondary support. The double cavity type piezoelectric micropump has the advantages of being large in flow, compact and small in structure, low in noise and extremely high in practical value.

Description

technical field [0001] The invention relates to the field of pumps, in particular to a piezoelectric pump. Background technique [0002] In some fields, such as electronic products, aquarium and other fields, whether it is a water pump or an air pump, it is generally required that its volume should be as small as possible, the noise generated should be as low as possible, the flow rate should be as high as possible, and the pressure should be within certain requirements. In terms of value, the existing traditional pumps, such as motor pumps, are generally difficult to meet the requirements of small volume and low noise; now, piezoelectric pumps appearing on the market have solved the problem of large volume and high noise. For example, see the piezoelectric pump disclosed in Chinese patent CN200580039113.1, and its embodiment 1 discloses a piezoelectric pump with a monolithic single cavity (one piezoelectric vibrator corresponds to a variable cavity). The working method is ...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem of low flow rate of existing piezoelectric pumps, the present invention provides a double-cavity piezoelectric micropump that can greatly increase its flow rate with a small increase in volume, and the noise does not increase due to the increase in flow rate.

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