Array substrate detecting head and device and array substrate detecting method

Abstract

The invention provides an array substrate detecting head and device and an array substrate detecting method and belongs to the field of array circuit detecting. The array substrate detecting head is used for detecting a plurality of array circuits on an array substrate and comprises a detecting head body, a probe component and a detecting circuit. The probe component is disposed on the detecting head body and used for loading testing signals to the signal endpoints of the array circuits. The detecting circuit is disposed on the detecting head body and used for detecting the testing signals transmitted by the array circuits. By the array substrate detecting head, omnibearing testing of the array circuits on the substrate can be achieved, and loss caused by collision of detecting heads and probe frames is avoided.

Description

technical field [0001] The invention relates to the field of array circuit detection, in particular to an array substrate detection head, a detection device, and an array substrate detection method. Background technique [0002] In the manufacturing process of thin film transistor liquid crystal display devices, thin film transistor array circuits are formed on glass substrates through the mask-exposure process commonly used in semiconductors. The quality of the array circuits directly determines the quality of thin film transistor liquid crystal display devices. The detection of the array circuit has become an important process in the manufacturing process. [0003] like figure 1 As shown, in the prior art, when the array circuit is tested, the glass substrate with the array circuit, that is, the array substrate 5, is placed on the test machine 4, the test machine 4 is provided with a detection frame 3, and the detection frame 3 is provided with a Probe frame 2, the probe...

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Problems solved by technology

[0004] In actual production, due to the different arrangement and distribution of different liquid crystal display products, it is necessary to purchase different types of probe frames to realize the test. When switching between different liquid crystal display products, it is necessary to replace the corresponding type of probe frames to meet the testing needs. Larger; and part of the array circuit will be covered by the detection frame, making it impossible to detect; in addition, the distance between the detection head and the probe frame is sometimes very close during detection, which is prone to interference between the detection head and the probe frame, resulting in expensive detection Damage to the head or damage to other parts

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