Method for detecting subsurface damage degree characterization parameters of spherical optical element

Abstract

The invention discloses a method for detecting subsurface damage degree characterization parameters of a spherical optical element. The method comprises the following steps: processing an annular cross section on a spherical optical element through using a magneto-rheological finishing process, corroding the annular cross section, observing the exposed amplified micro-crack morphology through using a laser confocal microscope, and measuring and calculating the two-dimensional images of the micro-crack to obtain the width W of a heavy lamination on the finished annular cross section, the width S of a subsurface damage layer on the finished annular cross section, the length AB of the micro-crack, the density of the micro-crack and an angle theta between the micro-crack and amnd the external diameter of the subsurface damage layer; and calculating according to a planimetry process by means the radius of curvature R of the known spherical optical element and obtained data information to obtain the thickness dssd of the subsurface damage layer of the spherical optical element, the depth hssd of the subsurface damage layer, and the radial length dscrack of the micro-crack on the spherical surface of the optical element.

Description

technical field [0001] The invention relates to a method for obtaining a characterization parameter system (depth and thickness of the damaged layer, density of microcracks in the damaged layer and radial length along the spherical optical element) capable of realizing damage to the subsurface of the ultra-precision spherical optical element. Background technique [0002] With the development of modern science and technology, optical components have been widely used, especially high-precision optical components, which involve ultra-precision processing, precision detection technology, optics and semiconductor fields in terms of technology, and energy, space, and national defense in terms of application. High-end fields such as equipment, integrated circuits and MEMS. With the development of optics, microelectronics, MEMS (micro-electromechanical system) and related technologies, the requirements for the surface quality of high-precision components are getting higher and high...

AI Technical Summary

Problems solved by technology

[0003] The current research on subsurface damage of optical components is mainly concentrated in the field of aspheric optical components. However, in practical optical systems, spherical optical components still occupy the most important position, but there is still no good characterization of its subsurface damage. method, so improving the detection of subsurface damage on spherical optical elements is of great significance to improving the performance of the entire optical system

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