Mixed insulating gas low temperature gas supply device
A technology of mixing insulating gas and low temperature, which is applied in gas/liquid distribution and storage, equipment installed in pressure vessels, piping systems, etc. Rapid inflation or replenishment, accurate and reliable air mixture ratio
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[0011] The present invention will be further described below in conjunction with the accompanying drawings. exist figure 1 In the illustrated embodiment, the gas in the first cylinder is CF 4 , SF 6 Air supply circuit and CF 4 The structure of the supplementary gas circuit is the same, and both include a pipeline 20 provided with a manual valve 13, a fan heat exchanger 14, a decompression regulator 15, a first pressure gauge 16 and a mass flow controller 17 in sequence, and the pipeline 20 is close to the fan exchanger. One end of the heater 14 communicates with SF 6 The other end of the gas cylinder 1 or the first gas cylinder 2 is connected to the gas mixer 5 . The gas mixer 5 adopts a spiral tube with an isolation baffle, and has two output ends. One output end is connected to the atmosphere through the first control valve 10, and the other output end is passed through the second control valve 11, the buffer tank 6, and the electromagnetic flow valve in sequence. 9 and...
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