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Splicing structure of microscopic scattering dark field image on surface of optical element

A technology of microscopic scattering and optical components, which is used in image enhancement, image data processing, instruments, etc., and can solve the problems of long time stitching and poor robustness.

Inactive Publication Date: 2014-10-29
INST OF AUTOMATION CHINESE ACAD OF SCI +1
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Problems solved by technology

[0004] In view of this, the object of the present invention is to provide a method for mosaicing microscopic scattering dark field images on the surface of optical elements to solve the problems of long time-consuming and poor robustness in the stitching of microscopic scattering dark field images on the surface of optical elements in the prior art

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  • Splicing structure of microscopic scattering dark field image on surface of optical element
  • Splicing structure of microscopic scattering dark field image on surface of optical element
  • Splicing structure of microscopic scattering dark field image on surface of optical element

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Embodiment Construction

[0039] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] Figure 1A A flow chart showing a method for mosaicing microscopic scattering dark-field images on the surface of an optical element of the present invention includes the following steps:

[0041] Step S1: Use a line scan camera to scan the surface of the optical element along a specified path, and take a microscopic scattering dark field image of the surface of the optical element;

[0042] Step S2: extracting SIFT feature matching point pairs from the regions of interest of the left and right adjacent microscattering dark-field images;

[0043] Step S3: Using a parallel clustering algorithm to filter the extracted SIFT feature matching point pairs to obtain the best set of feature matching point pairs;

[0044] ...

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Abstract

The invention discloses a splicing structure of a microscopic scattering dark field image on surface of an optical element. The method comprises the following steps: scanning the surface of the optical element along a specified patch through a line-scan digital camera; extracting SIFT (Scale Invariant Feature Transform) feature matching point pairs from left and right adjacent interested areas of the microscopic scattering dark field images; screening the SIFT feature matching point pairs by the parallel clustering algorithm to obtain the optimal feature matching point pair set; calculating transformation matrix of the overlapped parts of two pictures according to the optimal feature matching point pair set; splicing the images through the transformation matrix. With the adoption of the method, the splicing of the microscopic scattering dark field image on the surface of the optical element can be stably and quickly performed, little time is cost, the robustness is high, and the splicing error is small.

Description

technical field [0001] The invention relates to the fields of computer vision and image processing, and more particularly, to a splicing method for microscopic scattering dark field images on the surface of an optical element. Background technique [0002] Dark field imaging is an ideal method for defect detection of optical components. It uses active light sources to illuminate the optical components to be tested. If there are defects in the optical components such as scratches and pits, scattered light will be generated at the defects. The optical imaging system receives the scattered light generated by the defect, and generates an image with a black background and a bright defect in the foreground. [0003] The common mosaic method of micro-scattering dark-field images on the surface of optical components is to take the dark-field images of the surface of optical components through an area array micro camera, and define the two adjacent images to be stitched as the inclus...

Claims

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Application Information

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IPC IPC(8): G06T5/50
Inventor 尹英杰张正涛熊召刘长春徐德张峰陶显白明然
Owner INST OF AUTOMATION CHINESE ACAD OF SCI
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