High-sensitivity resonant MEMS vector hydrophone structure

Abstract

The invention relates to a vector hydrophone and specifically relates to a high-sensitivity resonant MEMS (Micro Electro Mechanical System) vector hydrophone structure. The high-sensitivity resonant MEMS vector hydrophone structure is used for solving the problems of poor antijamming capability and low sensitivity of the existing vector hydrophone. The high-sensitivity resonant MEMS vector hydrophone structure comprises a four-beam arm silicon microstructure, a micro cylindrical body, a central connector, driving electrodes and detection electrodes, wherein the four-beam arm silicon microstructure and the central connector are located in the same plane; the lower end of the micro cylindrical body is vertically fixed in the center of the upper surface of the central connector; eight driving electrodes and eight detection electrodes are arranged; the first driving electrode is paved on the left front part of the upper surface of the front beam arm of the four-beam arm silicon microstructure, while the second driving electrode is paved on the left rear part of the upper surface of the front beam arm of the four-beam arm silicon microstructure. The high-sensitivity resonant MEMS vector hydrophone structure is applicable to accurate positioning and measurement of underwater acoustic pressure signals.

Description

technical field [0001] The invention relates to a vector hydrophone, in particular to a high-sensitivity resonant MEMS vector hydrophone structure. Background technique [0002] As one of the important components of the sonar system, the vector hydrophone is widely used in the precise positioning and measurement of underwater sound pressure signals. At present, vector hydrophones can be divided into the following two types according to their sensitive conversion elements: the first type of vector hydrophone uses a resonant tunneling diode RTD (such as a resonant tunneling diode RTD disclosed in Chinese patent ZL200610012991.0) Tunneling bionic vector underwater acoustic sensor). This kind of vector hydrophone has the advantages of good frequency response and high sensitivity, but it is greatly affected by temperature and environmental noise during work, so it has the problem of poor anti-interference ability. The sensitive conversion element of the second type of vector hy...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of poor anti-interference ability and low sensitivity of existing vector hydrophones, the present invention provides a high-sensitivity resonant MEMS vector hydrophone structure

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