Capacitance flexure accelerometer with adjustable scale factor

Abstract

The invention discloses a capacitance flexure accelerometer with an adjustable scale factor. The capacitance flexure accelerometer comprises a quality detecting part, a pair of differential capacitors, a sensor, a computing module and a static executer. The quality detecting part is connected with a fixed framework through a flexible structure. The pair of differential capacitors comprises two moveable pole plates and two fixed pole plates. The two movable pole plates are formed by metal coatings on the two side faces of the quality detecting part, and the two fixed pole plates are symmetrically arranged on the two sides of the quality detecting part and right opposite to the two movable pole plates respectively. The two movable pole plates are connected with the input end of a sensor, the output end of the sensor is connected with the input end of the computing module, the output end of the computing module is connected with the input end of the static executer, and the output end of the static executer is connected with the two movable pole plates. According to the capacitance flexure accelerometer, the scale factor can be adjusted in a large scale, the capacitance flexure accelerometer can be widely applied to accelerometer gravity gradient instruments, and the horizontal movement acceleration noise along a rotary table plane and the angular acceleration noise along a rotary table rotating shaft are effectively restrained.

Description

technical field [0001] The invention belongs to the technical field of earth gravitational field measurement, and more particularly relates to a capacitive flexible accelerometer with adjustable scale factor. Background technique [0002] The Earth's gravity field is one of the most basic physical fields in the near-Earth space, reflecting the composition and distribution of materials inside the Earth. By accurately measuring the Earth's gravity field, the distribution and changes of materials on the Earth's surface can be estimated by inversion. The measurement of the earth's gravitational field includes the measurement of the gravitational acceleration and the gravitational gradient tensor. Since the gravitational gradient tensor is the second-order derivative of the gravitational potential, the gravitational gradient measurement is more sensitive to the short-wave component of the gravitational field than the gravitational acceleration measurement. Measuring the gravitatio...

AI Technical Summary

Problems solved by technology

When multiple accelerometers form a gradiometer, an additional scale factor adjustment coil is added near the magnetic pole of the accelerometer head, and the calibration of the paired accelerometers is realized by applying an adjustment current corresponding to the mismatch of the scale factor in the coil. The degree factor consistency matching, which puts forward extremely high requirements on the uniformity and stability of the permanent magnetic poles constituting the accelerometer head. In addition, the adjustment of the magnetic field generated by the permanent magnetic poles will also introduce problems such as nonlinearity and temperature disturbance.

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