Reticle increment calibration method for laser galvanometer system

Abstract

Provided is a reticle increment calibration method for a laser galvanometer system. A reticle increment scanning and optical sensor measurement analysis method is adopted, a traditional calibration target is not needed, only an automated measuring device simple in structure is needed, under the circumstance that calibration precision is guaranteed, influences of human factors are effectively reduced, and workloads are reduced; meanwhile, the method can be well applied to calibrating large-size planes.

Description

technical field [0001] The invention relates to the technical field of laser vibrating mirror systems, in particular to a crosshair incremental calibration method for laser vibrating mirror systems. Background technique [0002] The laser galvanometer system uses a laser as the light source, and the laser beam emitted by it passes through the scanning galvanometer and related optical devices, focusing on the plane, and the scanning trajectory of the laser on the plane can be controlled by the computer. Therefore, in the process of laser scanning, accurate scanning path is particularly important to ensure the trajectory accuracy. However, due to installation errors of lasers, scanning galvanometers and other related optical devices, alignment errors in optical path alignment, and defocus errors in the spot in the plane, etc., these will cause the laser beam emitted by the laser to not scan according to the ideal trajectory. . Therefore, usually before the laser galvanometer...

AI Technical Summary

Problems solved by technology

In the existing calibration method, it is first necessary to install the calibration plate or calibration paper to a specific position to ensure that the calibration surface is flush with the original plane, and then at least 9 points of calibration and calibration are required, which mainly rely on Calibration personnel observe to judge whether the laser spot or laser track coincides with the standard point or line, which has a large subjective and human factor, which may make the calibration accuracy not meet the requirements

[0004] 2. Not suitable for laser calibration using multi-laser equipment

If the existing calibration method is adopted, the calibration plate and calibration paper are required to have a matching large format, and a large-sized calibration plate and calibration paper has high processing costs and cannot guarantee the quality of the calibration well. Size and location accuracy of fixed points

At the same time, the large calibration plate is not easy to carry, which is not conducive to the maintenance of the remote laser galvanometer system

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