Silicon micro-resonant type accelerometer

Abstract

The invention provides a silicon micro-resonant type accelerometer which mainly comprises a glass substrate. A silicon micro-mechanical structure is bonded to the surface of the glass substrate and comprises a mass block and four silicon micro-mechanical structure units, the mass block is of a central symmetry structure, and the mass block is surrounded by the four silicon micro-mechanical structure units which are arranged in a pairwise symmetry mode; each silicon micro-mechanical structure unit comprises a resonant type double-end tuning fork, a micro-mechanical lever and a decoupling guiding support, one ends of the decoupling guiding supports are connected with the mass block to receive inertia force, the other ends of the decoupling guiding supports are connected with one force input ends of the micro-mechanical levers, and the received inertia force is transmitted by one force output ends of the micro-mechanical levers to the resonant type double-end tuning forks.

Description

technical field [0001] The invention belongs to the field of micro-inertia measurement of micro-electromechanical systems, and in particular relates to a silicon micro-resonance accelerometer. Background technique [0002] Silicon microresonant accelerometers have the characteristics of high stability, high resolution, and large dynamic range. They are considered to be microelectromechanical systems (MEMS) inertial navigation devices that can achieve high-precision measurements, and have important applications in the field of defense. Research on high precision, miniaturization and high integration of silicon microresonant accelerometers has also been carried out. [0003] However, silicon microresonant accelerometers in the prior art have potential problems such as simple structure, weak decoupling ability, temperature drift, and vibration coupling. Contents of the invention [0004] To sum up, it is indeed necessary to provide a silicon microresonant accelerometer that ...

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Problems solved by technology

[0003] However, the silicon microresonant accelerometers in the prior art have potential problems such as simple structure, weak decoupling ability, temperature drift, vibration coupling, etc.

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