Air floatation table with follower cable table
A technology of cable platform and air flotation platform, which is applied in the field of air flotation platform, can solve the problems of limited capacity of high-pressure gas cylinders and short running time, and achieve the effect of long running time, improved carrying capacity and small disturbance
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specific Embodiment approach 1
[0025] Specific implementation mode one: the following combination Figure 1 to Figure 6 Describe this embodiment, the air bearing platform with a follower cable platform described in this embodiment, it includes a base 1, a base guide rail 2, a pair of air bearing guide rails 3, an air bearing beam 4, an object stage 5, and a Y-axis Follow-up cable table 6, X-axis follow-up cable table 7, X-axis communication box 8, Y-axis communication box 9, Y-axis follow-up table communication box 10, X-axis follow-up table communication box 11, X-axis grating sensor 12. Y-axis grating sensor 13 and host computer,
[0026] The base 1 is a cuboid, and one side of the upper surface of the base 1 is arranged in parallel with a base guide rail 2 and an air bearing guide rail 3, the base guide rail 2 is close to the edge of the base 1, and another air bearing guide rail 3 is arranged on the other side of the upper surface of the base 1. A pair of air-floating guide rails 3 are parallel to each...
specific Embodiment approach 2
[0038] Specific Embodiment 2: This embodiment further describes Embodiment 1. The base 1 in this embodiment is a marble base.
specific Embodiment approach 3
[0039] Embodiment 3: This embodiment further describes Embodiment 1 or 2. The position of the stage 5 in this embodiment is measured by a straight grating sensor.
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