Micro-assembly-oriented submicron precision coaxial confocal alignment detection method and device

Abstract

The invention relates to a micro-assembly-oriented submicron precision coaxial confocal alignment detection method and device. According to the method, prism-based coaxial alignment laser confocal detection is adopted to achieve real-time imaging detection of a target part and a base part, laser confocal high-precision detection is adopted in the high-precision alignment detection process of a micro device, detection precision breaks through the diffraction limit of the traditional microscopic optical imaging, and detection precision can be smaller than 1 micron. The coaxial alignment prism structure design is the key for guaranteeing relative position error of the target part and the base part through laser confocal detection. Twice reflection of an isosceles right-triangle prism is used for achieving imaging of the target part and the base part on a laser confocal image plane, and relative position error detection calculation in the micro device assembly alignment process is guaranteed. Through combination of a high-precision base part clamping precise-adjusting platform and a target part clamping mechanical linear displacement table, the detection system can achieve submicron-precision assembly alignment precision.

Description

technical field [0001] The invention relates to a sub-micron precision coaxial confocal alignment detection method and device for micro-assembly, especially relates to the detection of micro-miniature structures and the optical path design of geometric optical alignment detection, and belongs to the field of micro-detection, micro-operation and high-precision assembly of micro-devices. Background technique [0002] For the high-precision assembly of micro-devices, the accurate detection of the relative positional relationship between the target part and the base part during the assembly process is one of the key steps to realize the high-precision assembly of micro-miniature devices. The alignment detection accuracy of the target part and the base part directly affects the overall assembly accuracy of the micro-device, and plays a vital role in improving the success rate and accuracy of the assembly of the micro-device. The traditional monocular, binocular or multi-eye micro...

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Problems solved by technology

[0005] Judging from the current research results in the field of micro-assembly based on machine vision at home and abroad, many different schemes have been proposed for the assembly alignment detection of the target of the assembly object and the base part. Observing the space position information of the part, the exact position and orientation information of the three-dimensional space of the part cannot be obtained, so the operation and assembly of the part with a slightly complicated stru

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