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Method for preparing self-supporting graphite porous amorphous carbon thin film

An amorphous carbon, self-supporting technology, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of inability to obtain self-supporting amorphous carbon film, high ambient temperature, and inability to obtain porous structure carbon film And other issues

Inactive Publication Date: 2014-03-19
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a preparation method of self-supporting graphite porous amorphous carbon film, the purpose of which is to solve the problem of high ambient temperature and inability to obtain porous structure carbon in the preparation method of the prior art. Thin films and technical problems of not being able to obtain self-supporting amorphous carbon films

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  • Method for preparing self-supporting graphite porous amorphous carbon thin film
  • Method for preparing self-supporting graphite porous amorphous carbon thin film
  • Method for preparing self-supporting graphite porous amorphous carbon thin film

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[0026] The amorphous carbon film prepared by the preparation method of the amorphous carbon film with graphite-like structure provided by the present invention has the characteristics of self-supporting, transparent and porous structure, and the thickness can be controlled from tens of nanometers to hundreds of nanometers. This provides a new way for the preparation of amorphous carbon thin films. The method includes: cleaning the substrate metal nickel sheet, heating the nickel sheet by feeding hydrogen gas at a temperature not lower than 600°C in a tube furnace, feeding hydrocarbon gas at a temperature not lower than 600°C for growth, Cool down and etch the nickel sheet with ferric chloride solution to form an amorphous carbon film. Compared with the current technology of amorphous carbon film preparation, the present invention has the following advantages: (1) simple equipment and low cost; (2) simple operation and fast preparation process; (3) self-supporting amorphous car...

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Abstract

The invention discloses a method for preparing a self-supporting graphite porous amorphous carbon thin film. The method comprises the following steps: S1, carrying out ultrasonic cleaning on a metal nickel sheet substrate, drying and placing in a tube furnace; S2, introducing an inert gas into the tube furnace; S3, heating the tube furnace to 600-720 DEG C, introducing hydrogen into the tube furnace and heating the metal nickel sheet substrate; S4, introducing a hydrocarbon into the tube furnace, catalyzing the splitting decomposition of the hydrocarbon by using the heated metal nickel sheet substrate and growing an amorphous carbon thin film; and S5, cooling the tube furnace, soaking the nickel piece on which the amorphous carbon thin film grows in a corrosive liquid and corroding the nickel sheet substrate to obtain the self-supporting graphite porous amorphous carbon thin film. The method disclosed by the invention has low requirement to environment temperature and has the advantages that the obtained amorphous carbon thin film has a porous structure and a self-supporting structure and can be transferred to any substrate very conveniently.

Description

technical field [0001] The invention belongs to the technical field of amorphous carbon films, and more specifically relates to a preparation method of self-supporting graphite-like porous amorphous carbon films. Background technique [0002] Amorphous carbon film is one of many carbon materials. Its research history can be traced back to the 18th century. Its performance was only studied in the 1940s, and its application began in the 1960s. There are three types of hybridization of carbon atoms in carbon materials: sp 3 hybridization, sp 2 hybridization and sp 1 Hybrid, the amorphous carbon film can be said to be a diamond (carbon atoms only have sp 3 hybrid) and graphite (carbon atoms only sp 2 hybrid) intermediate state of the structure. According to the hybridized carbon atoms sp 2 Unlike sp3 content, amorphous carbon films are generally classified into diamond-like amorphous carbon films (sp 3 Content>sp 2 content) and graphite-like amorphous carbon film (sp ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/52C23C16/56
Inventor 魏合林朱大明刘宇昊
Owner HUAZHONG UNIV OF SCI & TECH
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