Ceiling transport vehicle and article transport facility
A technology for transporting vehicles and roofs, which is applied in the direction of conveyor objects, conveyors, load blocks, etc., and can solve problems such as large spaces
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[0069] Embodiments of the present invention will be described below based on the drawings.
[0070] Such as figure 1 As shown, the ceiling conveying vehicle 1 equipped in the article conveying facility is configured to be guided and supported by the traveling rail 2 provided on the ceiling, and is configured to travel along the traveling path 3 passing above the conveying target position E to convey the formed object as an article. It is a plate-shaped substrate W. In addition, in this embodiment, as the board|substrate W, the photomask used for processing of the glass substrates, such as a liquid crystal panel, is conveyed by the top conveyance vehicle 1. As shown in FIG.
[0071] In addition, the horizontal direction along the traveling direction will be referred to as the front-rear direction, and the horizontal direction perpendicular to the front-rear direction will be referred to as the lateral width direction. exist figure 1 In , the front-rear direction is indicated...
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