Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error, inconsistent influence, and inability to determine whether the interferometer group and measuring mirror belong to standard laser interferometer components or It belongs to the problem of being calibrated, and achieves the effect of small Abbe error and guaranteed accuracy
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] A shape-compensated four-axis axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and four receivers 8, 9, 10, 11 arranged at positions capable of receiving standard laser interferometer interference signals, and wires Connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; on the output optical path of the standard laser interferometer laser 1, an intermediate through hole 16 is arranged to allow the calibrated laser interferometer to measure the light beam 15 through the four-axis hollow standard laser interference mirror group 2; one side of the four-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 21, the moving table 20 is fitted on the guide rail 21, and a flat mirro...
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