Multifunctional automatic four-point probe tester

Abstract

A multifunctional automatic four-point probe tester comprises a vacuum suction sheet bearing table, a four-point probe assembly, a three-shaft driving mechanism, a camera and a main control computer. The four-point probe assembly is arranged on the three-shaft driving mechanism. The shooting direction of the camera right faces the vacuum suction sheet bearing table. The signal output end of the camera and the signal output end of the four-point probe assembly are connected with the signal input end of the main control computer. The control signal input end of the three-shaft driving mechanism is connected with the control signal output end of the main control computer. The suction sheet bearing table of the multifunctional automatic four-point probe tester can be used for fixing broken silicon wafer samples, so that the tester is made to have the function of fixing samples and prevent samples form moving in the testing process. The camera is used for shooting the position and the shape of a silicon wafer, and images can be used for locating, so that the fragment processing function of the equipment is achieved. A four-point probe three-dimensional driving mechanism is controlled to enable a four-point probe to move and be located in the suction piece bearing table. Moreover, the driving mechanism is downward pressed through a Z-axis to enable the probe to be automatically pressed downward to realize automatic measuring.

Description

technical field [0001] The invention relates to a multifunctional automatic four-probe tester. Background technique [0002] The four-probe method is the most widely used method for measuring the resistivity of semiconductors. The conventional four-probe method is to contact four rigid probes with the sample surface in a straight line and uniformly, apply a constant precise DC current I to the first and fourth probes, and use a high-precision voltmeter to measure the middle second and third probes. Needle voltage U. The four-probe tester is a multi-purpose comprehensive measuring device using the four-probe measurement principle, and it is a special instrument for testing the resistivity and sheet resistance (sheet resistance) of semiconductor materials. The instrument is composed of a host, a test bench, a four-probe probe, and a computer. The measurement data can be displayed directly by the host, or can be controlled by the computer to collect test data and analyze it i...

AI Technical Summary

Problems solved by technology

[0003] Due to the need to manually adjust gears, long measurement cycles, low work efficiency, and unstable measurement results, the traditional four-probe tester has been unable to adapt to the development of the times, and it is necessary to seek a new type of test equipment

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