Vertical conveying device of substrate

Abstract

The invention discloses a vertical conveying device of a substrate capable of preventing the displacement of the substrate from the positioning part to the pick-up part during the weight shifting. The vertical conveying device is provided with a supporting member, a positioning loading machine used to adjusting a positioning part loaded on the substrate of the supporting member, and an absorbing elevating unit capable of absorbing and elevate the substrate of the supporting member, and a pick-up step transmitting part capable of conveying the substrate to the etching unit under the pick-up state of the pick-up member. With the help of the falling operation of the absorbing elevating unit, the weight shifting of the substrate from the positioning loading machine to the pick-up transmitting part can be finished.

Description

technical field [0001] The present invention relates to a vertical substrate transfer device, and more particularly to a substrate vertical transfer device capable of vertically moving a substrate made of a brittle material or the like to a chucking step in a correctly positioned state. Background technique [0002] exist figure 1 , indicates that in the prior art, a substrate that has been put into a loader is transported to a scribing and transporting section where a scribing step is performed. Such as figure 1 As shown, in order to scribe the substrate 1 put into the loader A according to the application, the substrate 1 must be transported horizontally to the scribing unit 30 on the scribing transfer unit D. As shown in FIG. [0003] Therefore, first, the conveyor belt 3 of the supply loader A is rotated, and the board|substrate 1 is conveyed to the positioning loader B. As shown in FIG. The loader B is positioned to perform the work of positioning the X-axis and Y-ax...

AI Technical Summary

Problems solved by technology

Specifically, the small difference in height and rotation speed of each conveyor belt will cause the position of the substrate 1 to deviate.

[0008] Once it is picked up on the pick-up step transfer part C in a state where the position has been shifted, there is the following problem: after marking by advancing or retreating the tool of the marking head installed in the marking unit 30, it cannot Obtain unit substrates with desired high dimensional accuracy

In addition, there are also problems such as pick-up deviation and substrate cracking during the scribing operation.

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