System for processing equipment processing capacity data and method thereof

A technology of processing capability and capability data, applied in the semiconductor field, can solve problems such as lack of system integration interface, inability to realize statistical analysis, insufficient system hardware and software environment, etc.

Inactive Publication Date: 2013-10-09
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology

[0004] However, due to the lack of system hardware and software environment and the lack of system integration interface, the calculation of equipment processing capacity lacks system support
In addition, because the data of equipment processing capacity is not processed only scatteredly, and the integrated and unified management of these data has not been realized, managers cannot collect data on equipment processing capacity, and further fail to realize statistical analysis of basic data for calculation of equipment processing capacity

Method used

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  • System for processing equipment processing capacity data and method thereof
  • System for processing equipment processing capacity data and method thereof
  • System for processing equipment processing capacity data and method thereof

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Embodiment Construction

[0031] The implementation of the present invention will be described in detail below in conjunction with the drawings and examples, so that the realization process of how to use technical means to solve technical problems and achieve technical effects in the present invention can be fully understood and implemented accordingly.

[0032] In the following embodiments of the present invention, the data collection device is used to collect data on the capability of equipment added; the data storage device stores the data collected by the data collection device; the processing capability analysis device reads and collects data from the data storage device. The equipment processing capacity data, and based on this, carry out index statistical analysis on the current processing capacity of the equipment to obtain the processing capacity index. Through the above-mentioned technical solution, the integrated and unified management of these data is realized, which facilitates the manageme...

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Abstract

The invention discloses a system for processing equipment processing capacity data and a method of the system, and belongs to the technical field of semiconductors. The method comprises the steps that the equipment processing capacity data are collected through a data collecting device; a data storage device stores the equipment processing capacity data collected by the data collecting device; a processing capacity analyzing device reads the collected equipment processing capacity data from the data storage device, and carries out indicative statistical analysis on the current processing capacity of equipment accordingly to obtain a processing capacity indicator. Through the technical scheme, integrated unified management on the data is achieved, administrative staff can collect the equipment processing capacity data conveniently, and the statistical analysis on the calculated essential data of the processing capacity of the equipment is further achieved.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a processing system and method for equipment processing capability data. Background technique [0002] In the manufacturing process of semiconductor wafers, it is necessary to evaluate and analyze the processing capabilities of manufacturing equipment to ensure the normal operation of the manufacturing process. Thus, it can be seen that the calculation of the capability of equipment to achieve effective management is very important in the process of manufacturing and managing semiconductor wafers. [0003] At present, in order to realize the calculation of equipment processing capacity, the technical solution usually adopted is that each system processes data independently, and the data is transmitted through manual import or file transmission. [0004] However, due to the lack of system hardware and software environment and the lack of system integration inte...

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Application Information

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IPC IPC(8): G06F17/40
Inventor 王海杰陈艳朱敏陈毅俊
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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