Positioning method of electric control object stage
A positioning method and stage technology, applied in the direction of measuring devices, instruments, measuring instrument components, etc., can solve the problem that the stage is not easy to be positioned accurately, and achieve the effect of not being easy to move and high stability
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Embodiment 1
[0045] A stage with electric control position, such as figure 1 As shown, it includes a support column 11, a pin 12, a plunger 13, a fixed base plate 14, and a motor 15 that can rotate the pin 12. In this embodiment, there are three support columns 11 and they are not on the same plane. Since the three points have sufficient positioning and satisfy the geometric three-point fixed plane, the three upper ends of the support columns can determine the loaded object on a plane.
[0046] Pin 12 is an eccentric pin, such as figure 2 As shown, it consists of a part contacting the carried object 21, a part 22 fixed on the substrate 14 and a mechanism 23 part whose lower end is matched with the electrode. The position of the carried object placed on the support column can be adjusted by the rotation of the pin.
[0047] The part of the support column 11 fixed on the base plate 14 and the lower end has a mechanism part matched with the motor. The rotation of the motor can drive the support co...
Embodiment 2
[0063] An electronically controlled position stage, which includes the stage and three eccentric pins that control the position of the loaded object. The eccentric pins have an adjustment function and can accurately determine the loaded object on a certain plane. The role of location. The eccentric pin with adjustment function is an eccentric pin, which is composed of two cylinders with different shafts. The surfaces of the two cylinders have a threaded structure. The eccentric pin is fixed on the stage through this structure for preventing loosening The nut fixes the adjusted eccentric pin on the stage, and there is an adjustment mechanism on the eccentric pin. In this embodiment, the adjustment mechanism is a circular hole, which can be rotated and adjusted by inserting a rod into it.
[0064] The stage in this embodiment has three hard-point support columns, which can fix the loaded object on a certain plane through the three support points, and the height of the hard-point su...
Embodiment 3
[0077] An electronically controlled position carrier is used to place objects with regular appearance and high position accuracy requirements. The support frame includes a support column, an eccentric pin, and a base for fixing the support column and the eccentric pin. The support columns are three hard support columns whose positions are not in a straight line, which are made of stainless steel and have a threaded structure that can rotate the support column at the contact position of the support column and the base, that is, it can be adjusted by the threaded structure The height of the support point of each support column. Three support columns can fix the supported table on a certain plane. In this embodiment, three eccentric pins are fixed on the base, which are made of hard wear-resistant materials. The position of the eccentric pins is on the periphery of the triangle formed by the support column and is not on a straight line. The fixed position is corresponding to the s...
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