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Double-faced film-coating method suitable for passive element

A technology of double-sided coating and passive components, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., to achieve the effects of increasing fluency, maintaining consistency, and streamlining the process cycle

Inactive Publication Date: 2013-06-19
JUANT TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the problems mentioned in the background technology, the present invention proposes a double-sided coating method suitable for passive components to solve the problems existing in the prior art

Method used

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  • Double-faced film-coating method suitable for passive element
  • Double-faced film-coating method suitable for passive element
  • Double-faced film-coating method suitable for passive element

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Embodiment Construction

[0044] The method for double-sided coating of passive components provided by the embodiments of the present invention will be described below with reference to the relevant drawings. For ease of understanding, the same components in the following embodiments are described with the same symbols.

[0045] First, as attached figure 1 As shown, the double-sided coating equipment suitable for passive components used in this embodiment includes a loading chamber 1, a plasma cleaning chamber 2, a first low-pressure chamber 3, a process chamber 4, and a second low-pressure chamber 5 , Carrying out the cavity 6 and the conveying system 7 . There is a gate between the loading chamber 1 and the plasma cleaning chamber 2 . There is a gate between the plasma cleaning chamber 2 and the first low-pressure chamber 3 . There is a gate between the first low-pressure chamber 3 and the process chamber 4 . There is a gate between the process chamber 4 and the second low-pressure chamber 5 . Th...

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Abstract

The invention provides a double-faced film-coating method suitable for a passive element, mainly comprising the following steps of: providing a double-faced film-coating device suitable for the passive element; conveying articles to be plated to a first deposition space in a process chamber by a conveying system, and performing a deposition process on a single surface or multiple surfaces of the articles to be plated; and conveying the articles to be plated to a second deposition space in the process chamber by the conveying system, and performing another deposition process on another single surface or other multiple surfaces of the articles to be plated. The method of the invention reduces a complex degree and cost of producing process, and can maintain low pressure consistency in the process chamber. The method of the invention can further increase fluency in a double-faced film-coating process.

Description

technical field [0001] The invention relates to a double-sided coating method suitable for passive components. Background technique [0002] The existing double-sided electrode layer of passive components is formed by screen-printing silver paste on the surface of the passive component body, and then pre-baked at 150 to 200 degrees Celsius. The passive components are sintered at a high temperature of up to 900 degrees Celsius to ensure silver paste adhesion. However, the screen double-sided printing process takes nearly an hour. Compared with the double-sided deposition method, it is not only time-consuming and labor-intensive, but also extremely expensive. It is also a major criticism for the environmental protection problems caused by the high-temperature process. That is, the existing double-sided screen printing process needs to be heated at high temperature for tens of minutes, which not only consumes energy but also causes the ambient temperature to rise. Contents o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/56
Inventor 李智渊蔡硕文黄耀贤蔡俊毅
Owner JUANT TECH
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