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Cooling device of built-in motor of motorized spindle and dicing machine

A technology for cooling devices and electric spindles, applied in cooling/ventilation devices, electromechanical devices, electrical components, etc., can solve problems such as coolant leakage, overheating and burning of electric spindle precision, scrapping, etc., to achieve control of thermal deformation and working accuracy, and solve Leakage of coolant and the effect of improving the degree of automation of equipment

Active Publication Date: 2013-06-05
CETC BEIJING ELECTRONICS EQUIP
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  • Abstract
  • Description
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a cooling device for the built-in motor of the electric spindle and a dicing machine, which can reliably cool the built-in motor of the spindle when the electric spindle is working, thereby effectively solving the problem caused by the failure of the sealing ring in the related technology. Leakage of coolant, unexpected temperature rise of the built-in motor of the electric spindle or even overheating and burning, and the reduction or scrapping of the electric spindle

Method used

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  • Cooling device of built-in motor of motorized spindle and dicing machine

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Embodiment Construction

[0027] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0028] Such as figure 1 As shown, an embodiment of the present invention provides a cooling device for a built-in motor of an electric spindle, including: a cooling liquid supply part for providing cooling liquid; a cooling liquid channel for inputting the cooling liquid provided by the cooling liquid supply part and The flow direction of the cooling liquid is controlled, and the built-in motor of the electric spindle is cooled. This embodiment can reliably cool the spindle motor through the coolant in the coolant channel when the electric spindle is working.

[0029] Further, the above-mentioned cooling device may further include: a coolant flow meter, configured to control the flow rate of the coolant supplied to the coolant channel by the coolant pro...

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Abstract

The invention provides a cooling device of a built-in motor of a motorized spindle and a dicing machine. The cooling device comprises a cooling liquid providing part which is used for providing cooling liquid and a cooling liquid passage which is used for inputting the cooling liquid which is provided by the cooling liquid providing part and controlling the flow direction of the cooling liquid. The cooling device of the built-in motor of the motorized spindle and the dicing machine can stably cool the motor of the spindle when the motorized spindle is working.

Description

technical field [0001] The invention relates to integrated circuit packaging equipment, in particular to a cooling device and a dicing machine for a built-in motor of an electric spindle. Background technique [0002] The dicing machine is the key equipment for the post-packaging of integrated circuits, and its function is to divide the wafer into individual circuit units. The dicing machine generally uses a high-speed aerostatic electric spindle as the core executive component to achieve high-precision powerful grinding. In this kind of dicing machine, the performance indicators such as the stiffness, rotation accuracy, output power and reliability of the aerostatic electric spindle directly determine the cutting quality of the dicing machine. With the rapid development of the integrated circuit manufacturing industry in the direction of high precision and high speed, the quality requirements of wafer dicing are getting higher and higher. [0003] When the dicing machine ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K9/19
Inventor 贾月明王明权李战伟胡汝强
Owner CETC BEIJING ELECTRONICS EQUIP
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