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Wide-range high-precision facial contour detection device and detection method thereof

A surface shape detection, high-precision technology, applied in the field of optical detection, can solve problems such as 2π ambiguity, nonlinear error, etc., and achieve the effect of large measurement range, improved measurement range and high measurement accuracy

Inactive Publication Date: 2013-06-05
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0006] The purpose of the present invention is to provide a large-scale and high-precision surface shape detection device and its detection method to solve the problems of 2π ambiguity and the introduction of nonlinear errors in the prior art

Method used

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  • Wide-range high-precision facial contour detection device and detection method thereof
  • Wide-range high-precision facial contour detection device and detection method thereof
  • Wide-range high-precision facial contour detection device and detection method thereof

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Embodiment

[0049] choose and Measure the central wavelength, the specific measurement process is as follows:

[0050] (1) with is the center wavelength, by adjusting the driving voltage of the variable frequency laser, changing the output wavelength value, so that the phase shift step wavelength is , to perform phase-shift interferometry on the test piece, and store the phase-shift interferometry images collected by the CCD camera into the computer.

[0051] (2) to is the center wavelength, by adjusting the driving voltage of the variable frequency laser, changing the output wavelength value, so that the phase shift step wavelength is , to perform phase-shift interferometry on the test piece, and store the phase-shift interferometry images collected by the CCD camera into the computer.

[0052] (3) Use the computer to process the collected interference images to solve the surface shape of the measured surface.

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Abstract

The invention belongs to the technical field of optical detection, and particularly relates to a wide-range high-precision facial contour detection device and a detection method of the wide-range high-precision facial contour detection device. The problems of 2 pi blur and leading of non-linear errors occur in the prior art, and in order to solve the problems in the prior art, the wide-range high-precision facial contour detection device is characterized by comprising a laser light source, a bean expanding mirror, a collimating lens, a spectroscope, a standard reference mirror, a charge coupled device (CCD) camera, an image collecting system and a computer. The laser light source is a frequency conversion laser capable of frequency conversion. The wide-range high-precision facial contour detection device is simple, high in reliability and large in measuring range.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a large-scale and high-precision surface shape detection device and a detection method thereof. Background technique [0002] Optical surface shape detection is one of the most important and basic detection items in optical parts detection. It will directly affect the quality of optical parts, and it is also an important symbol of the level of optical detection. Therefore, research on optical surface shape detection is carried out. is of great significance. [0003] The most typical detection method is phase shift interferometry. Conventional phase-shift interferometry usually uses a single wavelength, and then changes the phase difference between the reference light and the test light by some method to achieve phase modulation. Phase shifting methods can be divided into two categories: hardware phase shifting and variable frequency phase shifting. Hardwa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 田爱玲刘剑王红军刘丙才朱学亮王春慧
Owner XIAN TECHNOLOGICAL UNIV
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