Integrated type six degrees of freedom precision positioning platform

Abstract

The invention discloses an integrated type six degrees of freedom precision positioning platform. The integrated type six degrees of freedom precision positioning platform comprises a base, a lower platform component, a middle platform component and an upper platform component. The integrated type six degrees of freedom precision positioning platform utilizes a piezoelectric ceramics brake to enable the lower platform component to achieve rectilinear motion along an X direction and a Y direction of a coordinate system, enable the middle platform component to achieve a rectilinear motion along an Z direction of the coordinate system and a rotary oscillation around an axis which is parallel to the X axis and an axis which is parallel to the Y axis, and enables the upper platform component to rotate around the Z axis. The integrated type six degrees of freedom precision positioning platform can achieve precise control position on the six degrees of freedom and effectively avoids displacement coupling among axes due to the fact that the middle platform component and the lower platform component are designed into a symmetric structure. Meanwhile, the transmission platform can achieve integral manufacture, is driven by the piezoelectric ceramics brake, has the advantages of being free from friction and coupling, being high in precision, long in journey and high in resolution rate and can meet complex manufacturing and operation requirements of nanometer science and technology studies.

Description

technical field [0001] The invention relates to a flexible precision transmission platform, in particular to an integrated six-degree-of-freedom precision positioning workbench. Background technique [0002] With the rapid development of microelectronics technology, micro-nano technology, aerospace engineering, precision engineering, bioengineering and other disciplines, the manufacturing field has entered the "submicron-nano" era. With the rise and rapid development of micro-nano technology, precision positioning technology with high positioning accuracy and high resolution is urgently needed in many scientific and technological fields such as precision machinery manufacturing, instrumentation, optics, and material science. The nano-scale micro-motion workbench provides one-dimensional, two-dimensional and multi-dimensional nano-scale motion for the research of nano science and technology, and is an essential key instrument and equipment for nano science and technology rese...

AI Technical Summary

Problems solved by technology

[0003] In the prior art, there are Stewart platforms, magnetic levitation worktables and piezoelectric worktables for nanoscale processing. Although the first two can meet the requirements of large strokes, it is difficult to meet the requirements of nanoscale precision. At the same time, there are also complex structures. , Difficult to process, difficult to control and other shortcomings, while the piezoelectric platform based on piezoelectric ceramics has the advantages of high precision, compact structure, fast response, etc., but the piezoelectric platform at this stage is basically limited to less than four degrees of freedom, free movement The degree is limited, there is no platform that can realize large rotation swing and rotation along the horizontal plane, and its stroke is small, and its movement amount and movement ability are difficult to meet the requirements of complex processing and operation

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