Vertical large displacement micro-electromechanical system (MEMS) micromirror and processing technology

A large displacement, micromirror technology, applied in optical components, optics, instruments, etc., can solve the problems of single structure and affect the work efficiency of MEMS micromirrors, and achieve the effect of ensuring work efficiency, ensuring stability, and improving use efficiency

Active Publication Date: 2015-04-15
无锡微文半导体科技有限公司
View PDF3 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] But the existing MEMS micromirror, because the structure of its driving arm is single, makes the height difference between the mirror body and the micromirror frame in the MEMS micromirror almost zero, so in the actual application process, will greatly limit the MEMS micromirror. The trajectory of the mirror body, for the MEMS micromirror, the smaller the trajectory of the mirror body, it directly means the working effect of this type of MEMS micromirror, which in turn affects the working efficiency of the MEMS micromirror.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vertical large displacement micro-electromechanical system (MEMS) micromirror and processing technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0035] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0036] Such as figure 1 As shown, the present invention has designed a kind of vertical large-displacement MEMS micromirror, comprises micromirror frame 1, mirror body 2 and drive arm 3, mirror body 2 edge is connected with micromirror frame 1 by drive arm 3, on drive arm 3 A first conductive trace is provided, and the driving arm 3 includes two straight beams 4 and three corresponding double-layer film Bimorph structure connectors 5, and several heating resistors are arranged on the double-layer film Bimorph structure connectors 5 7. The first conductive wire is connected to the heating resistor 7; between each straight beam 4, between the straight beam 4 and the micromirror frame 1, and between the straight beam 4 and the edge of the mirror body 2 through a double-layer film Bimorph structure The connecting piece 5 is...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a vertical large displacement micro-electromechanical system (MEMS) micromirror and the processing technology. The vertical large displacement MEMS micromirror comprises a micromirror frame (1), a micromirror body (2) and driving arms (3). The edge of the micromirror body (2) is connected with the micromirror frame (1) through the driving arms (3). Each driving arm (3) comprises two straight girders (4) and three double-membrane bimorph structure connection parts (5) corresponding to the two straight girders (4). A plurality of heating resistors (7) are arranged on each double-membrane bimorph structure connection part (5). First electric conduction wires are further arranged on the driving arms (3) and connected with the heating resistors (7). The vertical large displacement MEMS micromirror has the advantages of being capable of enabling the micromirror body (2) to be in the position of vertical large displacement opposite to the micromirror frame (1), enlarging movement path of the micromirror body (2) and improving working efficiency of the MEMS micromirror.

Description

technical field [0001] The invention relates to a vertical large-displacement MEMS micromirror and a processing technology. Background technique [0002] Miniaturization, high performance, low cost, and large quantities are the pursuit goals of today's device manufacturing. MEMS technology came into being at this time and was widely used by the majority of manufacturers. Devices manufactured using MEMS technology can be mainly divided into two categories. One is purely miniaturized traditional devices, such as micro-optical platforms, whose advantages are concentrated in expanding the use of miniaturized systems; Devices that cannot be produced by traditional methods, such as geomagnetic sensors. [0003] As an outstanding representative of microelectromechanical systems (MEMS), MEMS micromirrors are rich in variety and excellent in performance. Of course, the vigorous development of MEMS micromirrors is also inseparable from the urgent market demand for MEMS micromirrors...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08
Inventor 丁金玲谢会开陈巧
Owner 无锡微文半导体科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap