Polishing Pads for Polishing Systems

Abstract

A polishing pad of a polishing system is mountable to a polishing plate and has a predetermined channel pattern so as to allow a polishing liquid supplied from a polishing liquid supplier to move on a polishing surface. The channel pattern has at least two kinds of patterns.

Description

technical field [0001] The present disclosure relates to a polishing pad, and more particularly, to a polishing pad of a polishing system for polishing a glass plate for a liquid crystal display. Background technique [0002] In general, it is very important to maintain the flatness of a glass plate (or glass substrate) for a liquid crystal display to a specified level in order to accurately represent an image. The glass sheets are produced by the fusion method or the float method. Most existing glass sheets (approximately 95% or more) are produced by the float process. Float-produced glass (or float glass) is processed into ribbons in floating basins and cut into predetermined dimensions in a subsequent cutting process. In addition, a polishing process is performed to remove fine unevenness or impurities appearing on the surface of the float glass. [0003] Meanwhile, the polishing process of the glass substrates may be classified into a method of polishing individual gl...

AI Technical Summary

Problems solved by technology

This results in a flow difference or non-uniform flow of the polishing fluid flowing through the grooves formed at the polishing pad 1

Meanwhile, in the case where the polishing pad 1 has such a groove pattern, if the polishing rate is high or the amount of polishing liquid supplied is large, slippage may occur during the polishing process.

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