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Micromechanical magnetic field sensor and application thereof

A magnetic field sensor and micromechanical technology, applied in the direction of the size/direction of the magnetic field, electric magnetometer, etc., can solve the problem that the output signal cannot eliminate the influence of the capacitive coupling signal, and achieve the effect of increasing strength, improving sensitivity, and enhancing strength

Active Publication Date: 2013-02-06
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a micro-mechanical magnetic field sensor, which is used to solve the problem that the output signal of the micro-mechanical magnetic field sensor in the prior art cannot eliminate the influence of the capacitive coupling signal

Method used

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  • Micromechanical magnetic field sensor and application thereof
  • Micromechanical magnetic field sensor and application thereof
  • Micromechanical magnetic field sensor and application thereof

Examples

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Embodiment 1

[0081] Such as Figures 2a to 2c As shown, the present invention provides a micromechanical magnetic field sensor, the micromechanical magnetic field sensor at least includes: a pair of resonant oscillators and an insulating layer 6 and a metal coil 7 sequentially formed on the surface thereof, wherein the pair of resonant oscillators includes: The resonant oscillator structure 1 , the main support beam 21 , the first anchor point 41 and the driving electrode 5 . In the first embodiment, the pair of resonant oscillators further includes a first coupling beam 31 and a second anchor point 42 .

[0082] The resonant oscillator structures 1 are two and both are axisymmetric structures, and the symmetry axes of each resonant oscillator structure 1 include at least a first symmetry axis and a second symmetry axis, and the first symmetry axis is perpendicular to the second symmetry axis. axis. The material of the resonator structure 1 is single crystal silicon, polycrystalline sili...

Embodiment 2

[0122] The technical solution of the second embodiment is basically the same as that of the first embodiment, the difference mainly lies in that the structure of the resonant oscillator in the first embodiment is a square plate, and the pair of resonant oscillators includes a first coupling beam, a second anchor point, a second Two coupling beams and the third anchor point; in the second embodiment, the resonant oscillator structure is a rectangular plate, and the resonant oscillator pair does not include the first coupling beam, the second anchor point, the second coupling beam and the third anchor For the rest of the resonant oscillator centering (structure, manufacturing method and working principle), please refer to the relevant description of the first embodiment, and will not repeat them here.

[0123] Such as Figure 3a and 3b As shown, the second embodiment provides a micro-mechanical magnetic field sensor, the micro-mechanical magnetic field sensor at least includes:...

Embodiment 3

[0137] The technical solution of the third embodiment is basically the same as that of the first embodiment, the main difference is that: the structure of the resonant oscillator in the first embodiment is a square plate; in the third embodiment, the structure of the resonant oscillator is a circular plate, and the resonant oscillator For the rest of the alignment (structure, manufacturing method and working principle), please refer to the relevant description of the first embodiment, and will not repeat them here.

[0138] Such as Figure 4a and 4b As shown, the third embodiment provides a micro-mechanical magnetic field sensor, the micro-mechanical magnetic field sensor at least includes: a pair of resonant oscillators and an insulating layer 6 and a metal coil 7 sequentially formed on the surface thereof, wherein the pair of resonant oscillators It includes: a circular plate resonant oscillator structure 1, a main support beam 21, a first coupling beam 31, a first anchor p...

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Abstract

The invention provides a micromechanical magnetic field sensor and application thereof. The micromechanical magnetic field sensor at least comprises a resonant vibrator pair and insulating layers and metal coils, which are formed on the surface of the resonant vibrator pair in sequence. The micromechanical magnetic field sensor has the following beneficial effects: the micromechanical magnetic field sensor utilizes single-ended capacitor excitation and electromagnetic induction to measure the size of a magnetic field, wherein two resonant vibrator structures forming the resonant vibrator pair work in a same phase mode, the winding directions of the metal coils on the resonant vibrator structures are opposite, and the induced electromotive forces generated by the metal coils on the two resonant vibrator structures are connected with each other in series; as output in a differential mode is adopted, capacitive coupling signals in output signals are eliminated to obtain simple magnetic field output signals; meanwhile, the two resonant vibrator structures are coupled by a coupling structure so that the two resonant vibrator structures are connected and move as a whole; and furthermore, the micromechanical magnetic field sensor has simple structure, large output signals, high sensitivity and high detection accuracy, is slightly affected by temperature and is suitable for high working frequency.

Description

technical field [0001] The invention belongs to the technical field of micromechanical magnetic field sensor design and detection, and relates to a magnetic field sensor, in particular to a micromechanical magnetic field sensor working in an expansion mode and a circuit structure thereof. Background technique [0002] By sensing the earth's magnetic field to identify directions or navigate ships, especially in the fields of navigation, aerospace, automation control, military and consumer electronics, magnetic field sensors are more and more widely used. Magnetic field sensing technology is developing towards the direction of miniaturization, low power consumption, high sensitivity, high resolution and compatibility with electronic equipment. According to the working principle, the magnetic field sensor can be divided into: superconducting quantum interference magnetic field sensor, Hall magnetic field sensor, fluxgate magnetometer, giant magnetoresistive magnetic field senso...

Claims

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Application Information

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IPC IPC(8): G01R33/028
CPCG01R33/028
Inventor 熊斌吴国强徐德辉王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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