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A kind of resistance testing method

A resistance test and resistance technology, applied in the direction of measuring resistance/reactance/impedance, measuring device, measuring electrical variables, etc., can solve the problems of inability to exclude the influence of contact resistance, large resistance resistance error, etc., and meet the requirements of low test equipment, The effect of solving test errors and high accuracy of test values

Active Publication Date: 2015-08-05
SHENZHEN SUNMOON MICROELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0021] The embodiment of the present invention provides a resistance testing method, which aims to solve the problem that the existing resistance testing method cannot eliminate the influence of contact resistance and the error of the measured resistance value is relatively large

Method used

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Embodiment Construction

[0064] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0065] The resistance testing method that the embodiment of the present invention provides is as figure 2 As shown, the testing machine has four testing terminals, which are the first testing terminal A of the testing machine, the second testing terminal B of the testing machine, the third testing terminal E of the testing machine, and the fourth testing terminal F of the testing machine. The four test terminals are respectively connected to the resistance R to be tested T The first test terminal D of the resistance to be tested 2 , the second test terminal D of the resistance to be tested 1 , ...

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Abstract

The invention is applicable to the field of resistance test, and provides a resistance test method. The resistance test method comprises the steps of: respectively connecting four test ends of a test machine with four test ends of a resistor to be tested, wherein the first test end and second test end of the test machine are connected on the same side of the resistor to be tested, and the third test end and fourth test end of the test machine are connected on the other side of the resistor to be tested; and respectively testing part or all of the resistance values among the four test ends of the test machine, and according to the part or all of the resistance values among the four test ends of the test machine, calculating the resistance value of the resistor to be tested. Through the application of the resistance test method provided by the embodiment of the invention, the problem that test errors are caused due to contact with the resistor in the existing resistance test method can be solved well; the test method is simple, is easy to implement, and has low requirements on test equipment; and the accuracy of tested values of tested resistors is high.

Description

technical field [0001] The invention belongs to the field of testing, in particular to a resistance testing method. Background technique [0002] In the manufacturing process of electronic products, especially integrated circuits, it is often necessary to test the resistance. During the wafer testing process of the integrated circuit chip, there are two kinds of parasitic resistances: the probe wire structure resistance of the wafer testing probe card and the contact resistance between the probe and the resistance testing terminal. When the resistance value to be measured requires high precision, the wire structure resistance and contact resistance often cannot be ignored. [0003] In the existing testing technology, the line structure resistance of the probe is eliminated mainly through the Kelvin compensation testing method. [0004] figure 1 It is a schematic diagram of the structure of the Kelvin test resistance, including the resistance to be tested R T , and are lo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R27/02
Inventor 赵春波李照华林道明谢靖付凌云
Owner SHENZHEN SUNMOON MICROELECTRONICS
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