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Method and device for measuring minute amplitude vibration of laser focused measuring head

A vibration device and focusing technology, which is applied in measuring devices, measuring ultrasonic/sonic/infrasonic waves, using wave/particle radiation, etc., can solve problems such as the inability to measure vibrations below the micron level

Inactive Publication Date: 2012-12-19
SHANGHAI INST OF MEASUREMENT & TESTING TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that traditional vibration measurement devices cannot measure vibrations below the micron level, and provide a laser focusing micro-amplitude vibration measurement device to realize the measurement of vibrations with amplitudes below the micron level

Method used

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  • Method and device for measuring minute amplitude vibration of laser focused measuring head
  • Method and device for measuring minute amplitude vibration of laser focused measuring head

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Embodiment Construction

[0009] According to attached figure 1 , the composition of the device for measuring micro-amplitude vibration with a laser-focused probe of the present invention includes a base 1, a bracket 2, an electric lifting platform 3 (stroke L), a laser-focusing probe 4, a horizontal moving platform 5, a fixture 6, and an electric lifting platform A controller 7, a data acquisition card 8, and a data processor 9. One side of the upper plane of the base 1 is fixed with an L-shaped support 2, and an electric lifting platform in the form of a cantilever beam is arranged on the top of the support 2, and the electric lifting platform moves up and down along the support 1, and a laser focusing probe 4 is set on the lower side of the cantilever end of the electric lifting platform. A horizontal moving platform 5 and a fixture 6 for clamping the vibration device to be tested are arranged directly under the laser focusing probe 4. The fixture 6 is on the horizontal moving platform 5, and the ho...

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Abstract

The invention discloses a method and a device for measuring minute amplitude vibration of a laser focused measuring head. The method is characterized by comprising the following steps: a vibrator to be measured is moved under the laser focused measuring head; a signal of the laser focused measuring head is acquired and transmitted to a data processor by a data acquisition card; after the data processor outputs a digital signal to the data acquisition card, the digital signal is converted into an analogue signal and output to an electric lifting platform controller; an electric lifting platform is driven to move near a focal plane of the laser focused measuring head by the electric lifting platform controller; when the vibrator to be measured starts vibrating, the distance between the surface of the vibrator and the surface of the laser focused measuring head is changed, and the signal of the laser focused measuring head is changed correspondingly; the frequency and the waveform of the signal of the laser focused measuring head reflect the vibration frequency and the waveform of the vibrator; and according to the linear relationship U=k*L+b between the displacement distance L and the signal U of the measuring head, b represents the output signal of the measuring head when the L is zero, and the amplitude is 1 / k time that of that of the signal of the measuring head.

Description

technical field [0001] The invention relates to a vibration measurement device, in particular to a method for measuring micro-amplitude vibration with a laser focus probe and the device used therefor, which is suitable for micro-amplitude vibration during ultra-precision machining in the fields of machinery, electronics, construction, and geology. Vibration measurement. Background technique [0002] The field of vibration measurement covers a wide range of fields such as machinery, electronics, construction, and geology. With the development of semiconductor, optical instrument industry and Mems industry, more and more components need to be processed with ultra-precision machining at micron or even nanometer level precision. Ultra-precision machining is extremely sensitive to micro-vibration, and eliminating or reducing micro-vibration is the key to ensuring product quality. By eliminating or reducing micro-vibration in this type of ultra-fine machining process, product qua...

Claims

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Application Information

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IPC IPC(8): G01H9/00
Inventor 刘一潘良明李矛
Owner SHANGHAI INST OF MEASUREMENT & TESTING TECH
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